is a recognized leader in Applied Thermal Technology with over 50 years of combined experience and is a global OEM supplier of custom equipment and component designs. We offer the following products and services;
Electric Furnace Systems which operate in Air or Inert Gas to 3000 F (1650˚C)
Heating chambers for :
Wafer Processing Furnaces
Muffle Furnaces
Industrial Processing
Ceramic Vacuum Formed Fibrous Components including:
Heating Elements
Custom Shapers
High Temperature Gaskets & Seals for door jams, pillows etc.
Foundry service: We offer a complete line of heating and insulation products
DS Fibertech Corporation
Furnace Elements and Insulation Products
Electric Furnace Systems which operate in Air or Inert Gas to 3000 F.
Heating Chambers for
Heating Chambers for:
Wafer Processing Furnaces
Solar Furnaces
Muffle Furnaces
Custom laboratory and Industrial Processing
Solid Oxide Fuel Cell (SOFC) Testing
Semiconductor Diffusion Heater Element Refurbishment
For OEM elements including; Tokyo Electron (TEL), Hitachi Kokusai, Axcelis, Silicon Valley Group (SVG) and various other oem models.
Each rebuilt diffusion heater element is carefully reverse engineered to assure exact replication of the original diffusion heater. Element
components are the same as used by the OEM. Refurbished elements will have the dimensional, electrical, and operating characteristics of the original OEM.
Semiconductor Diffusion Heater Element Refurbishment
Ceramic Vacuum Formed Fibrous Components including
Ceramic Vacuum Formed Fibrous Components including:
Heating Elements and Custom Shapes
High Temperature Gaskets & Seals for door jams, pillows etc.
Vestibule Blocks
Foundry Service for a complete line of heating and insulation products
Torch Elements
DS Fibertech offers both high and low flow torch elements with an improved design allowing for greater radiant energy pass through. They offer an extensive line of replacement torches for most major brands.
Including SVG Thermco, TEL & Novus
DS Fibertech Corporation is a world leader in the manufacturing of semiconductor diffusion heaters. Each year, we supply thousands of direct replacement diffusion furnace heater elements to wafer fabs and semiconductor foundries across the globe. Currently, we support close to 100 fabrication facilities, OEMs, and contract maintenance providers, in countries located throughout North America, Asia, Europe, and Australia. DS Fibertech Corporation also provides refurbisment and burn-in services.
Please click on links to view various model configurations, features, and cross-sections.
Diffusion Furnace Wafer Boat
Vulcan Diffusion Heater (1350°C)
Hercules Diffusion Heater (1300°C)
Mercury Diffusion Heater (350°C-1250°C)
Apollo Diffusion Heater (1000°C)
Diffusion Heater Related Products
Heater Element Refurb & Services
DS Fibertech Corporation offers direct replacements of diffusion heater elements from OEMs, such as:
Tokyo Electron (TEL):
VMM-56-002APM, VMM-56-201APM, VMM-40-101APM, VMM40-102APM, VMU-40-102EXAPM, VMM-35-001APM, VMM-35-002APM, VMU-54-001APM, VMU-40-009APM, VMU40-007APM, VMU-40-007EXAPM, VMU-40-007SEAPM, VMU-40-003APM, VMU-28-017APM, VMU-28-014APM, VOS-56-003, VOS-56-002, VOS-40-017, VMU-40-007, VMU-40-103, VMM-40-101, VMM-40-102, VMM-40-005, VMU-28-017, VMU-54-001
Hitachi Kokusai:
F-330C-88V-4Z, F-330C-93V-4Z, D4EX04882, D4EX03531, D4EX02648
Axcelis:
ST-200
Silicon Valley Group (SVG):
602783-02, 602783-03
Various Other OEM Models:
UL-260-08H-MK3(W), HDS-610A5-C, F-210V-87, FC-200, FC200L, DC-1300, DC-1300PLUS, DCHT-500
