Vaporizer
Semiconductor
■ Maximum Vaporation rate : 5g/min (H2O)
■ Heater Power : 220V, 500W
■ Carrier Gas Flow Rate : 30L/min (Max)
■ Max temp : 200℃
■ Weight : 2kg
Quartz Heater
Semiconductor
■ Type: Bottom & Substrate
■ Material: Quartz
■ Bonding: Diffusion Bonding
■ Heater: Coll & Yarn
■ Heater Zone: 1or2 Zone
■ Shaft: All-in-One
■ Condition: ATM & Vacuum
■ Max Using Temp: 800℃ (In Low Vac)
■ Ramping Rate > 50℃/min
■ Electric Properties: Customizable
Multiple Hot Trap
Semiconductor
■ Meterial : Body(SUS304),단열 Jacket
■ Surface treatment : Bare
■ Max Temp : 600℃
■ Operating temp : 500℃±(3 Zone)
■ Power Volt : 208V
Block Heater
Semiconductor
■ Meterial : Body(AL6061-T6),Cover(PEEK)
■ Product Size : Free
■ Surface treatment : Bare
■ Max Temp : 200℃
■ Operating temp : 150℃±1% 이내
■ Power Volt : 208V
200mm Molding Heater
Semiconductor
■ Meterial : Aluminum
■ Max using temp : 420 ℃
■ △℃: Less than 3 ℃
■ Heating Area : 1 zone
■ Surface treatment
- Anodizing
- Ceramic Coating
- Electropolishing
- Bead Blasting Etc
PTC Block Haeter
Semiconductor
■ Meterial : AL6061-T6(Block),Cover(PEEK)
■ Product Size : 100x120x80T
■ Surface treatment : Bare
■ Max Temp : 180℃
■ Operating temp : 100℃~150℃±1% 이내
■ Power Volt : 110V
Distribution Plate
Semiconductor
■ Meterial : AL6061-T6
■ Product Size : ф460x35T
■ Surface treatment : Hard Anodizing 50um
■ Max Temp : 300℃
■ Operating temp : 150℃~150℃±1% 이내
■ Power Volt : 220V
LID Heater
Semiconductor
■ Meterial : AL6061-T6
■ Product Size : ф472x10T
■ Surface treatment : Vibrator & Hard Anodizing 50um
■ Max Temp : 300℃
■ Operating temp : 150℃~300℃±1% 이내
■ Power Volt : 208V
중공축 Heater
Semiconductor
■ Meterial : AL6061-T6
■ Product Size : ф396x35T
■ surface treatment : Polising
■ Max Temp : 400℃
■ Operating temp : 300℃±1%
■ Power Volt : 208V
Vector Heater
Semiconductor
■ Meterial : AL6061-T6 or AL1100
■ Product Size : ф
■ Surface treatment : Bare
■ Max Temp : 450℃
■ Operating temp : 400℃~450℃±1.5% 이내
■ Power Volt : 208V
Lower Temp Heater
Semiconductor
■ Product Size : ф240
■ Surface treatment : Polishig
■ Max Temp : 400℃<
■ Operating temp : 250℃±1% 이내
■ Power Volt : 208V
High Temp. Heater
Semiconductor
■ Meterial : SUS & Inconel
■ Product Size : ф300
■ Surface treatment : Mirror Polishing
■ Max Temp : 650℃
■ Operating temp : 600℃
■ Power Volt : 208V
In-Line Heater
Semiconductor
■ Material : Body(sus304),내부(Quartz)
■ Product Size : ф127*236
■ Surface treatment : Mirror Polishing
■ Max Temp : 900 ℃
■ Operating temp : 835 ℃
■ Power Volt : 208V
Gas Line Block Heater
Semiconductor
■ Dimension : 150L * ф67
■ Heater Zone : 1 Zone
■ Flow rate : 10ℓ
■ Heater temp : Max 200 ℃
■ Gas Outlet Temp : Max 170 ℃
■ Application Process : N2,Ar,He,Air
Aluminum molding heater 300mm
Semiconductor
■ Meterial : Aluminum
■ Max using temp : 420 ℃
■ △℃: Less than 3 ℃
■ Heating Area : 1~4 zone
■ Surface treatment
- Anodizing
- Ceramic Coating
- Electropolishing
- Bead Blasting Etc
UV Bake Heater
Semiconductor
■ Meterial : AL6061-T6
■ Product Size : ф200(8 inch)
■ Surface treatment : Hard Anodizing 50um
■ Max Temp : 150℃
■ Operating temp : 35℃~150℃±1% 이내
■ Power Volt : 220V
aln Heater 200mm, 300mm
Semiconductor
■ Material : aln(Aluminum Nitride)
■ Heater : Coil type
■ RF sheath : Mesh type
■ Heater zone : 1 or 2 zone
■ Shaft : All-in-one
■ Max using temp : 600℃(in low vacuum)
■ Ramping rate : Max 15℃/min
■ TC wafer temp : 550℃(in low vacuum)
■ Temp deviation : △T = <±3℃ (at 550℃)
■ Comment : Customize design
