Sub-Systems

Diener Precision Pumps is a world leader in the design, manufacturing and supply of precision gear and metering pumps used in a variety of applications.

Wafer Level Glass (WLG) lenses, plastic lenses, hybrid lenses, actuators, and modules

Millimeter-wave radar chips and micro-systems product,

Oscilloscopes, Data Loggers, RF and accessories

Measurement, Modeling and Design solutions for microwave components, circuits and RF sub-systems.

Developing semiconductor equiment parts and industrial heaters.

Electrical heaters, process heaters, thermocouples, temperature sensors.

Interface Control Technology Module & Parts: N2 Purge Load Port System, N2 FOUP Purge System. PECVD & PCVD Module & Parts: Cassette Loader, Wafer Transfer Module, RPCVD Installation

Plasma Technology, Electromagnetic Shield Technology, Gas Purification Technology, Automation System Technology, Precise Alignment Technology in Vacuum

Abatement and Liquid Delivery System

Deep-ultraviolet (DUV) light sources. Excimer lasers using argon fluoride (ArF) or krypton fluoride (KrF) gases to generate light in the deep-ultraviolet spectrum.

THC (Temperature & Humidity Controller), Dehumidifier, CHR (Chiller)

CHILLER, HEAT EXCHANGER, SCRUBBER, TEST CHAMBER. RETAINER RINGS and OTHER PROCESSING PARTS

Dry Vacuum Pumps for Solar, Semiconductor, Display

Transfer Module, EFEM, Aligner, LPM, Robot, Intelligent robot

Wafer Transfer Robots, FOUP Handling Robot, Reticle / Mask Handling Robot, Load Port / Loader, Aligners, EFEM (Equipment Front End Module)

EFEM, Atmospheric Robot, Transfer Module, Vacuum Robot

ROBOTS for semiconductor industry. Automation equipment in semiconductor, LCD, OLED, LED.

Scrubbers for exhaust gases, chillers to control the processing temperature on the Fab equipment

Semiconductor Equipment (Memory, Logic, Flash, Burn-in-Sorter Test Handler)/ SMD Placement System/ Mask Manufacture Equipment