Sub-Systems

Developing semiconductor equiment parts and industrial heaters.

Electrical heaters, process heaters, thermocouples, temperature sensors.

Interface Control Technology Module & Parts: N2 Purge Load Port System, N2 FOUP Purge System. PECVD & PCVD Module & Parts: Cassette Loader, Wafer Transfer Module, RPCVD Installation

Plasma Technology, Electromagnetic Shield Technology, Gas Purification Technology, Automation System Technology, Precise Alignment Technology in Vacuum

Abatement and Liquid Delivery System

Deep-ultraviolet (DUV) light sources. Excimer lasers using argon fluoride (ArF) or krypton fluoride (KrF) gases to generate light in the deep-ultraviolet spectrum.

THC (Temperature & Humidity Controller), Dehumidifier, CHR (Chiller)

CHILLER, HEAT EXCHANGER, SCRUBBER, TEST CHAMBER. RETAINER RINGS and OTHER PROCESSING PARTS

Dry Vacuum Pumps for Solar, Semiconductor, Display

Transfer Module, EFEM, Aligner, LPM, Robot, Intelligent robot

Wafer Transfer Robots, FOUP Handling Robot, Reticle / Mask Handling Robot, Load Port / Loader, Aligners, EFEM (Equipment Front End Module)

EFEM, Atmospheric Robot, Transfer Module, Vacuum Robot

ROBOTS for semiconductor industry. Automation equipment in semiconductor, LCD, OLED, LED.

Scrubbers for exhaust gases, chillers to control the processing temperature on the Fab equipment

Semiconductor Equipment (Memory, Logic, Flash, Burn-in-Sorter Test Handler)/ SMD Placement System/ Mask Manufacture Equipment

Chillers, Process Ambient Control. Process control for fluid delivery and wafer environment control

Semicon process refractometers are for in-line concentration monitoring in bulk chemical and slurry delivery dispensing, and point-of-use blending, spiking, and polishing processes.

Superconductor integrated circuits (ICs)

Custom ICs, sub-systems, or IP blocks.

RF High Reliability Space Products, Test Engineering Development services, Test, package assembly, device qualification, and product reliability testing, tape and reel services. Gain Blocks, GaN Power Amplifiers, MCMs And Hybrids.