Temp. Sensing; Control; Recirculators; Chillers; Heat Exch.

THC (Temperature & Humidity Controller), Dehumidifier, CHR (Chiller)

CHILLER, HEAT EXCHANGER, SCRUBBER, TEST CHAMBER. RETAINER RINGS and OTHER PROCESSING PARTS

Scrubbers for exhaust gases, chillers to control the processing temperature on the Fab equipment

Chillers, Process Ambient Control. Process control for fluid delivery and wafer environment control

Flame detectors using IT-based fire detection technology, temperature controllers, high- and multi-temperature sensors, thermal imaging fire detection cameras, security and fire detection cameras, automatic fire extinguishing systems for semiconductor.

Compensators and Compensating Thermal Enclosuers for CVD and ALD Sources

critical in-chamber heating and cooling devices, as well as custom-engineered thermal devices for a variety of wafer processing applications.

Semiconductor temperature control device series (Chiller), robot series (Wafer Sorter / AMR), local scrubber (Local Scrubber) and other special equipment, is now widely used in semiconductors, LED, LCD and other fields

Heaters, Heat exchangers, Titanium products, PTC heaters

Magnetometers, Magnetic shielding, Current supplies, Sensor networking, R&D components, Software support

Temperature and humidity control equipment. Chiller, heat exchanger, vacuum parts, valves, powder traps.

Scrubber, chiller, vacuum/pipe.

Industrial Chiller, Industrial Refrigerator, Multi-reactor Chiller (TCU), Battery Motor/Semiconductor Temperature Testing System and Ultra-low Temperature Chiller.

Peripheral heating solutions and related products to global semiconductor equipment manufacturers

PTFE Heat Exchanger, fluorine resin, engineering plastic parts professional production company

THERMAL CONTROL SOLUTION FOR THE SEMICONDUCTOR TEST INDUSTRY

Heaters, ALD system, hot plate, bake unit, gas supply unit, sensors,

Chillers and heat exchangers for semiconductor industry.

Dicing saws, dicing blades, wafer cleaners and mounters, UV curing system, water recycling equipment

Temperature systems for thermal testing and process cooling.