Cymechs, a leading Tool Automation Specialists, provides core system components including EFEMs, LPMs (FOUP Opener), ATM Robot for EFEM and Vacuum Robot with Transfer Chambers for semiconductor manufacturing.
In 2007, Cymechs was the firtst Korean company to developed high Vacuum Technology for semiconductor fabrication and we provide systems to leading companies including Samsung, SK Hynix, TSMC, Micron and Hitachi.
Transfer Module
> Product > Transfer Module
ARIES Series
Design Footprint optimally
Utility option:Consists of PM, GAS, CDA, PCW(Process Cooling Water)
ARIES-A400
– Possibility to install maximum 6 PMs
– Transfer 2 wafers to PM at the same time
– Load lock : DUAL STACK TYPE
– Load lock option : Consists of Cooling plate, Pre-Heater
ARIES-A600
– Possibility to install maximum 4PMs
– Load lock : ANGLE Type
– Load lock option : Consists of Cooling plate, VCE(Vacuum Cassette Elevator)
ARIES-Inline
– Possibility to install maximum 4 PMs
– INLINE Type TM – Use of 2 VACUUM ROBOTS
– Load lock : STACK Type
– Load lock option : Consists of Cooling plate, Pre-Heater
ARIES-A600-450(450mm)
– Possibility to install maximum 5 PMs
– Extendable TANDEM-TM structure
– Design Footprint optimally
– Load lock : STACK Type
– Utility option : Consists of PM GAS, CDA, PCW
– 450mm VTM Robot
EFEM
> Product > EFEM
PHOENIX Series
Design Footprint optimally
FFU RPM MODE, Pressure MODE
Possibility to install PM-ELEC RACK on the top of EFEM
PHOENIX-P200
– Install 2LPM
– Option : ALIGNER, Light curtain area sensor, Protection BAR
PHOENIX-P300
– Install 3LPM
– Apply for LINEAR TRACK MODULE
– Option : ALIGNER, Side storage, Light curtain area sensor, Protection BAR
PHOENIX-P400
– Install 4LPM
– Apply for LINEAR TRACK MODULE
– Option : ALIGNER, Side storage, Light curtain area sensor, Protection BAR
PHOENIX-P300-450(450mm)
– 2LPM (Possibility 3LPM)
– Design Footprint optimally
– Option : ALIGNER, Light curtain area sensor, Protection BAR
– FFU RPM Mode, Pressure MODE
– Possibility to install PM-ELEC RACK on the top of EFEM
– 450mm ATM Robot
– 450mm LPM
EFEM Soft
EFEM Software, the Windows-based platform was independently developed in C# and C++ and currently built and operated in EFEM. This supports a TMC field driving facilities and user-friendly GUI (operable only with a TMC without GUI)
A control method is largely categorized into the “Communication Control Type” handling Job and Schedule and the “EFEM Main Control Type” operated by commands from the process equipment. The Communication Control Type reports the EFEM status to FA Host while performing Interface Communication between EFEM Software and Process Module Controller.
Aligner
> Product > Aligner
VEGA Series
Wafer Notch Finding & Centering Center
DELTA PICK & PLACE Mode
VEGA-300C-V
– VACUUM GRIP Type
– Option : LIFT PIN MODULE
– Various Robot End-Effectors
VEGA-P300N-PS
– PASSIVE Type
– Minimize particles on Wafer backside from Wafer Edge Contact
– LIFT PIN MODULE
LPM
> Product > LPM
DURAPORT Series
Up / Down Mapping
Various Safety Interlock
Wafer ID Reading applied by RFID
DURAPORT-DE-300
– 300mm Wafer FOUP Open / Close device
– Various FOUP
– SWMI S2 and CE
DURAPORT-DMN2-300
– 300mm Wafer FOUP Open / Close & N2 Purge Device
– N2 Purge Function in the FOUP
– 1-In-let Nozzle & 3-In-let Nozzle FOUP
– Minimize N2 Purge time in the FOUP
DURAPORT-DP-450(450mm)
– 450mm Wafer FOUP Open / Close Device
– 450mm FOUP
– Up / Down Mapping Function
– Various Safety Interlock
– Wafer ID Reading applied by RFID
– Easy Maintenance
Robot
> Product > Robot
QUADRA Series
ATM Robot
QUADRA-QA-34,44
– QUADRA ATM Robot
– 200mm, 300mm Wafer
– Single arm(3 axis), Dual arm(4 axis)
– S-curve motion
– Z-stroke 300mm / 400mm
– Repeatability < 0.1mm (3σ)
– End Effector type : Vacuum grip, Edge grip, Passive
– Servo motor, Absolute encoder
VTM Robot
QUADRA-QV400, QV600
– QUADRA VTM Robot
– High vacuum environment
– 200mm, 300mm wafer
– Dual arm (4 axis), Quad arm (6 axis)
– Z-stroke 50mm / 120mm
– Repeatability < 0.1mm (3σ)
– Servo motor, Absolute encoder
