Fab Facility & Related Equipment

Semiconductor: FOUP Cleaner, POD Cleaner, Wet Station, Chemical Delivery Supply System, Metal Lift Off, Cassette & Magazine Cleaner. Display: OLED Mask Cleaner, Glass Cleaner, Etcher & Stripper, Auto Macro Inspection, Stream-Jet Printing, Lamination M/C,

Wafer and Substrate Mounters (Manual and Semi-automatic), Table-top UV Irradiators, Expanders, CO2 Bubblers, Transformers and other process automation equipment

Plasma Technology, Electromagnetic Shield Technology, Gas Purification Technology, Automation System Technology, Precise Alignment Technology in Vacuum

POU Abatement System, RTO (Regenerative Thermal Oxidizer), IES (Ion Exchange System)

Real-time in-line monitoring of trace amounts of metallic contamination. Total solution of metallic, organic and ionic contamination monitoring for gases, chemicals and wafers in the semiconductor ecosystem

Abatement and Liquid Delivery System

Semiconductor equipment and mobile phone manufacturing automation systems, robots for factory automation, equipment

THC (Temperature & Humidity Controller), Dehumidifier, CHR (Chiller)

CHILLER, HEAT EXCHANGER, SCRUBBER, TEST CHAMBER. RETAINER RINGS and OTHER PROCESSING PARTS

Semiconductor: Wet Etching & Cleaning Solutions RTP(Rapid Thermal Processing). Display: Thermal Process Solutions In-Line Solutions, Inspection Process Solutions. Robotics.

LED/OLED Equipment: Wireless logistics, Micro LED Chip AOI Inspector, Dispenser, PAD Cleaner, COG FOG AOI. Semiconductor: Mount Inspector, Wire Bonding, Die Attach, Wafer Warpage, WRS Inspector, STOCKER system, Wafer Edge, Macro Tower Lifter, STB, Rail.

Sputtering System, OLED System, Solar Module System, AMHS, AS/RS, 3D Printer, Converting Machine

Transfer Module, EFEM, Aligner, LPM, Robot, Intelligent robot

Wafer Transfer Robots, FOUP Handling Robot, Reticle / Mask Handling Robot, Load Port / Loader, Aligners, EFEM (Equipment Front End Module)

EFEM, Atmospheric Robot, Transfer Module, Vacuum Robot

ROBOTS for semiconductor industry. Automation equipment in semiconductor, LCD, OLED, LED.

Scrubbers for exhaust gases, chillers to control the processing temperature on the Fab equipment

Automated storage and retrieval system (AS/RS) Shuttle system Uni-SHUTTLE HP 3D robot warehousing system ALPHABOT Smart AGV Premex XIO Automated forklift Premex SLX Self-driving carriage-mounted Automated forklift Premex SLX with SVS AGV (automated guided

Water filters for semiconductor and LCD production lines. Water systems for electronics

Chillers, Process Ambient Control. Process control for fluid delivery and wafer environment control