Zeus manufactures and supplies equipment for the front-end process (Clean, Etch, Strip) and the back-end process (Flux, Etch, Debond), focusing on single wafer cleaning devices and batch wafer cleaning devices used in the semiconductor manufacturing cleaning process.
Also available for memory and logic devices We supply rapid heat treatment equipment for silicon wafers.
ION12
300mm Single Wafer Processor (12 Chamber)
APOLLON
300mm Single Wafer Processor
VENUS
High Temperature 300mm Single Wafer Processor
BW Series
300mm Batch Wafer Processor
ATOM
400mm Single Wafer Processor
RHP200/150 Series
RHP is the rapid thermal processing system which can be used for leading edge processes for memory or logic devices.
Wet Etching & Cleaning Solutions
Zeus manufactures and supplies facilities for the front-end process (Clean, Etch, Strip) and post-process (Flux, Etch, Debond) centered on single wafer cleaning devices and batch wafer cleaning devices used in the semiconductor manufacturing cleaning process.
ION12
300mm Single Wafer Processor (12 Chamber)
APOLLON
300mm Single Wafer Processor
VENUS
High Temperature 300mm Single Wafer Processor
BW Series
300mm Batch Wafer Processor
ATOM
400mm Single Wafer Processor
RTP(Rapid Thermal Processing)
Zeus supplies rapid heat treatment equipment for silicon wafers that can be used for memory and logic devices.
RHP200/150 Series
RHP is the rapid thermal processing system which can be used for leading edge processes for memory or logic devices.
Display
Zeus develops and produces facilities (HPCP / OVEN etc.) necessary for heat treatment technology to satisfy various customer needs in the DISPLAY (OLED, LCD, etc.) industry, and has a process operation capability system for factory automation (process logistics). We provide total solutions to domestic/overseas customers.
HP/CP System
Heat treatment after coating equipment of TFT/CF process.
Hot Air Oven System
Thermal Process Solutions
Pre Bake Oven
Thermal Process Solutions
LC Inspection System
Facility to inspect the appearance of cemented glass of ODF Line
Rubbing Steam Inspection System
Facility to examine the process status of the glass after PI line rubbing.
ODF Gravity Mure Inspection System
Facility to inspect the injection amount of liquid crystal of the ODF Line process
