RTP Rapid Thermal Processing

Semiconductor: Wet Etching & Cleaning Solutions RTP(Rapid Thermal Processing). Display: Thermal Process Solutions In-Line Solutions, Inspection Process Solutions. Robotics.

Manufacture Furnaces. Refurbishment and relocation of diffusion furnaces and RTP equipment. Spare parts

Monocrystalline growing furnaces for SiC, InP, GaP, GaAs, CDZ, InSb. Furnace for poly- GaAs, CdTe. Diffusion furnaces. Vacuum Equipment. Wet Process Equipment.

Crystal growing furnaces (Si, GaAs, Sapphire) and parts, wafer laser marking machine, wafer handling manipulator, wafer diffusion furnace, thermal process equipment, quartz crucible manufacturing equipment.

Advanced heat treatment equipment for production of power semiconductors, (Si, SiC, GaN), organic EL (OLED), MEMS, and VCSEL, for Packaging (Fan-Out WLP/PLP, Wafer Bump, others), liquid crystal displays (LCD) and organic EL (OLED).

Levitor single wafer Rapid Thermal Processing (RTP) system. Levitrack Atomic Layer Deposition system (ALD)

Crystal growing equipment for sapphire (HDC, Kyropolus), Si (CZ), InSb, GaAs, In. Vaccum coating equipment. Thermal diffusion equipment. Thermal vacuum test equipment. pBN and BN ceramic parts

Automatic, batch type, reducing atmosphere and vacuum coldwall furnaces and turnkey high vacuum systems for ceramic to metal and brazing technology as applied to electron tubes and similar devices.

High temperature, high vacuum and controlled atmosphere furnaces.

FPD and Semiconductor Equipment. Laser: Annealing, Lift-Off, Micro-Machining, Scribing and Cutting. RTP Equipment. Dispensing, Vacuum Bonding and Lamination Equipment. Plasma Equipment: Sputter System, Descum System, Thin Film Encapsulation

RTP and DLI CVD / DLI-ALD systems

heat treatment systems for producing power semiconductors, silicon and compound semiconductors, solar batteries, organic EL (OLED), polyimide and MEMS. Our product lineup covers heat treatments from a low-temperature range to 1850°C.

Thermal Process Equipment: CVD, Diffusion, Oxidation, Annealing.

Diffusion furnaces for specific technology requirements, whether it be LED, MEMS, PV, Nano or Semiconductor.

ALD, anneal, diffusion, vacuum furnaces. Chillers, hot and cold chambers. Display manufacturing equipment

industrial and laboratory ovens and furnaces, and environmental temperature cycling and stability test chambers

Laboratory and industrial furnaces and ovens.

Production equipment and turnkey solutions for PV, semiconductor and microelectronics. Diffusion, oxidation, annealing, CVD equipment. Furnaces for advanced packaging.

Manufacturer of RTP tool. Distrubutor of sputter, ahser, etch and metrology systems.

Chemical vapor deposition systems, gas & liquid delivery cabinets, gas panels, and related gas abatement systems.