Material Handling Systems

Semiconductor equipment and mobile phone manufacturing automation systems, robots for factory automation, equipment

Semiconductor: Wet Etching & Cleaning Solutions RTP(Rapid Thermal Processing). Display: Thermal Process Solutions In-Line Solutions, Inspection Process Solutions. Robotics.

Sputtering System, OLED System, Solar Module System, AMHS, AS/RS, 3D Printer, Converting Machine

Transfer Module, EFEM, Aligner, LPM, Robot, Intelligent robot

Wafer Transfer Robots, FOUP Handling Robot, Reticle / Mask Handling Robot, Load Port / Loader, Aligners, EFEM (Equipment Front End Module)

EFEM, Atmospheric Robot, Transfer Module, Vacuum Robot

ROBOTS for semiconductor industry. Automation equipment in semiconductor, LCD, OLED, LED.

Automated storage and retrieval system (AS/RS) Shuttle system Uni-SHUTTLE HP 3D robot warehousing system ALPHABOT Smart AGV Premex XIO Automated forklift Premex SLX Self-driving carriage-mounted Automated forklift Premex SLX with SVS AGV (automated guided

Hermes CO2 Bubbler, AOI, Metis Magic Water, ESD Nozzle, AGV

Automatic conveying equipment

Crystal growing furnaces (Si, GaAs, Sapphire) and parts, wafer laser marking machine, wafer handling manipulator, wafer diffusion furnace, thermal process equipment, quartz crucible manufacturing equipment.

High Voltage Pulse Instrumentation, ESD Instrumentation

Wafer transfer system ( SORTER/EFEM) technology, Standard Mechanical Interface(SMIF) technology, ultra-clean automation/ EUV automation technology, wafer surface curing processes, AGV, wafer ultra-clean automation storage system, and RFID tracking system.

Semiconductor temperature control device series (Chiller), robot series (Wafer Sorter / AMR), local scrubber (Local Scrubber) and other special equipment, is now widely used in semiconductors, LED, LCD and other fields

Industrial robots and components

PCB, Photo Chemical Milling (PCM), Surface Finishing, Thermal Processing Furnaces and Ovens, Automation Equipment. Solar production equipment.

Process cassettes. Automated and manufal wafer handling products. Bulk aligners. Mask picks, inspection stations, RSP openers.

Automation solution for semiconductor, FPD, LED, MEMS. Wafer handling and mask, reticle handling systems.

SEMICONDUCTOR ROBOTS, FLAT PANEL ROBOTS, CUSTOM & SCARA ROBOTS, LOAD PORTS

Plasma Power Generators, High Voltage Products, Low Voltage Power Supplies, Remote Plasma Sources, Temperature Measurement Products, SCR Power Controllers, Electrostatic Products, Gas Sensors, Artesyn Embedded Power