Wafer Transfer Systems

Transfer Module, EFEM, Aligner, LPM, Robot, Intelligent robot

EFEM, Atmospheric Robot, Transfer Module, Vacuum Robot

ROBOTS for semiconductor industry. Automation equipment in semiconductor, LCD, OLED, LED.

Crystal growing furnaces (Si, GaAs, Sapphire) and parts, wafer laser marking machine, wafer handling manipulator, wafer diffusion furnace, thermal process equipment, quartz crucible manufacturing equipment.

Wafer transfer system ( SORTER/EFEM) technology, Standard Mechanical Interface(SMIF) technology, ultra-clean automation/ EUV automation technology, wafer surface curing processes, AGV, wafer ultra-clean automation storage system, and RFID tracking system.

Process cassettes. Automated and manufal wafer handling products. Bulk aligners. Mask picks, inspection stations, RSP openers.

Automation solution for semiconductor, FPD, LED, MEMS. Wafer handling and mask, reticle handling systems.

Automated manufacturing systems. Advanced manufacturing and robotics integration.

Semiconductor and electronics handling robots. These robots are built for use in cleanroom applications, including ISO Class 1.

AMR robotic solutions for semiconductor industry.

Robots for FPD transfer, wafer transportation. RF and microwave power supplies and material handling equipment for semiconductor and flat panel manufacturing systems. Solar Inverter.

Die sorter, wafer transfer system, robotic dispensing system.

Semiconductor wafer transfer robot

Robotic and manual wafer and FPD substrate handling systems, aligners.

Direct metal bonding system for IGBT module, Reticle mask stocker, Non-contact wafer thickness measuring system, Wafer transfer system.

Wafer handling equipment manufacturer with a extensive experience on semiconductor industry.