POU Abatement System
POU Abatement System handles waste gas emitted during production processes in semiconductors, DISPLAYs, and related fields with high efficiency.
Products Line Up
FCTO
(Flameless Catalytic Thermal Oxidation)
700W / 2001W / 3001W
CAPACITY
500slm / 2000slm / 3000slm
Summary
High-temperature catalytic processing facility that combines the fluorine catalyst oxidation technology with wetting technology to simultaneously process combustible and soluble gas and NF3 at high efficiency
Using electric heater and waste gas reaction heat without separate fuel (LNG) combustion, it causes very low thermal NOx by oxidizing waste gas.
Cartridge can be maintained conveniently while minimizing contamination in FAB by applying a swap method for exchanging and retrieving Cartridge in the field without cleaning
Heat – Wet
508BWA / 1208BWA / 1501hw / Mi2000BW / Mi2500BW
CAPACITY
500slm / 1000slm / 1500slm / 3500slm / 4000slm
Summary
Electrical Heater and wet treatment technology are combined to process combustible and water-soluble gases
Maximize waste gas treatment with low driving costs
Powder Applicable to heavy-duty and corrosion processes
Manage and maintain conveniently through the quick and easy separation of the chamber and the wet department
Plasma – Wet
603PW
CAPACITY
500slm
Summary
The combination of Plasma technology and wet-type technology enables high-efficiency processing of PFCs gas such as CF4, CF2F6, SF6
Development of Torch Technology for High Pressure and Low Power enables stable long-term Torch operation
Maximize economy in operation of equipment by applying major part module system
Burn – Wet
651FW
CAPACITY
500slm
Summary
High-efficiency facility for processing PFCs gas by combining direct combustion technology with wet-tyle technology
Applies turbulence flame and water-wet devices in the chamber, enabling stable system operation at low cost
Multiple safety interlock systems are installed to prevent unexpected accidents
Manage and maintain conveniently through the quick and easy separation of the chamber and the wet department
Wet
502W / 502W_3K / 502W_9K
CAPACITY
500slm, 3000slm, 9000slm
Summary
Specialized in Metal Powder production process
The independantly developed Inlet anti-blocking device and Venturi device enable stable facility operation
The four independent wet department make up the maximum gas treatment.
505W / 1505W
CAPACITY
500slm, 1500slm
Summary
Many hydrogen-use process (EPI) dedicated
With the world’s only large capacity EPI process equipment, two Chambers can be processed simultaneously
The independantly developed Inlet anti-blocking device and Venturi device enable stable facility operation
The four independent wet department make up the maximum gas treatment.
RTO (Regenerative Thermal Oxidizer)
RTO decomposes VOCs to H2O and CO2 by thermal oxidation at elevated temperature.
IES (Ion Exchange System) features
Removes Odor,SOx, Acid and Alkaline gas using ion exchange fiber and regenerated liquid
Less usage of water and electricity and high efficiency than conventional scrubber with a consecutive/automatic operation system of physiochemical adsorbent
Ion Exchange Fiber:Ion exchange fiber is a fiber-phase adsorbent that is manufactured to form Radicals in non-woven fabrics and exchange anions and cations using irradiation.
