Various Gas Control Equipment

electronic gas supply solutions including electronic gas production, electronic equipment manufacturing and bulk gas supply.

Plasma Technology, Electromagnetic Shield Technology, Gas Purification Technology, Automation System Technology, Precise Alignment Technology in Vacuum

POU Abatement System, RTO (Regenerative Thermal Oxidizer), IES (Ion Exchange System)

Abatement and Liquid Delivery System

CHILLER, HEAT EXCHANGER, SCRUBBER, TEST CHAMBER. RETAINER RINGS and OTHER PROCESSING PARTS

Scrubbers for exhaust gases, chillers to control the processing temperature on the Fab equipment

LPC auto validation & cleaning, Micro mix gas flow controller

Gas Cabinets, Gas Abatement Systems, Process Containers

nitrogen and electronics material gases as well as total solutions including related equipment in the global electronics sector.

Chemical Dispense System, Chemical Mixing and Dispensing System, Chemical Dilution and Dispense System, Waste Chemical Collection System, Chemical Regeneration and Recycling Equipment, System Installation and Piping Operations, System Maintenance

Design, construction and providing integrated solutions for clean air, processing environment control mini-enviroment equipment,micro-contamination inspection,system engineering,and ESCD (intelligent building) service.

Air pollution control including Volatile Organic Compounds (VOCs) abatement system, inorganic acid and alkali scrubber, clean room Airborne Molecular Contamination (AMC) control, high boiling point VOCs solvent recovery, acid / alkaline/smoke

Waste gas treatment, Wastewater treatment, Cleanroom technology

Ultrapure Water System, Waste Water Treatment and Reclamation System, Anti-static equipment for ultrapure water, Super Bubbler WAC, ultrapure water piping and equipment materials for semiconductors

Semiconductor temperature control device series (Chiller), robot series (Wafer Sorter / AMR), local scrubber (Local Scrubber) and other special equipment, is now widely used in semiconductors, LED, LCD and other fields

Full engineering service for process and mechanical systems in semiconductor, solar, pharmaceutical and disk media industries. High Purity gas system installations.

Nitrogen Generators, Oxygen Generators, Gas Mixing Systems, High Pressure Air Compressors, Gas Compressors, Breathing Air Compressors, Industrial Air Compressors, Process Air & Gas Filtration, Compressed Air & Gas Dryers, Custom Engineered Nitrogen & Oxy

gas abatement systems in a series of scrubber-dry wet, thermal wet and burn types.

Plating Process solutions, ​Gas Abatement Systems, ​Deaeration Systems, ​Wet Process Tools, ​Process Support & Consulting ​

The company is the agent of KJL Group vacuum components, high-efficiency ice water machines for vacuum systems, and CDO heating and washing waste gas treatment machines for semiconductor factories.