Gas Purifing Equipment

nitrogen and electronics material gases as well as total solutions including related equipment in the global electronics sector.

Air pollution control including Volatile Organic Compounds (VOCs) abatement system, inorganic acid and alkali scrubber, clean room Airborne Molecular Contamination (AMC) control, high boiling point VOCs solvent recovery, acid / alkaline/smoke

Waste gas treatment, Wastewater treatment, Cleanroom technology

Plating Process solutions, ​Gas Abatement Systems, ​Deaeration Systems, ​Wet Process Tools, ​Process Support & Consulting ​

SiC epiwafers, chemicals for etching and deposition gases, PFC and etching gas treatment equipment.

Gas purification systems

Air purification engineering planning, design, construction, installation, commissioning

Electrical-Chemical Hydrogen Purify & Recycling System (EC-HPR).

Vacuum gate valve, plasma cleaning system, Etching & Ashing system and gas purifier & PSA system in semiconductor and FPD industry.

gas purifiers, waste gas cleaners and other equipment, and relevant piping work

supply of semiconductor raw material and equipment, which includes Wafer Sense, Mass Flow Controller, gas purifier and scrubber, etc

Water Purifying systems, Gas Purifying systems, Filter Elements

Critical subsystems, components and parts, and ultra-high purity cleaning and analytical services for the semiconductor industry. Gas Handling Equipment.

Gas Supply, monitoring and purification systems. Precursor supply system. Piping.

High purity and gas phase filters and equipment for clean rooms.

Advanced Purifier Solutions for High and Ultra High Purity Semiconductor Applications. Point of use, micro-bulk and bulk purifiers.

Electronic gases

Electronic gases

Gases and equipment

Gas plants