[ Vacuum Gate Valve ]
Isolation of Vacuum line between the process chamber and Vacuum pump
Soft Start in-line pneumatic gate valve (first developed in the world
Powder & Particle Free and Quick closing type Soft Start Gate Valve
[ Plasma Cleaning System ]
Effective Plasma Cleaning for Vacuum Pump & Foreline in Semiconductors & FPDs
Cost saving for Pump & Foreline Maintenance, decrease of the Particles
No impact on the Process
Applications : Foreline & Vacuum Pump cleaning on DIFF/ CVD/ METAL/ ETCH
[ RRG Ashing & Etching System ]
New Ashing process by Remote Radical Generation
Wide process window & damageless plasma
Low-k ashing process
High ashing/etching rate, High throughput
Refurbish & Retrofit for Etch & CVD process tools
[ Gas Purification System ]
Gas Purifier
PSA
Dryer
[ Gas Supply System ]
Gas Cabinet
Valve Manifold Box
[ H2 Gas Stationary System ]
High Performance Reformer
H2 Diaphragm Compressor
H2 Stationary Storage
Hydrogen Dispenser
