Thin Film Deposition, Etching, Cleaning & Drying

We provide production proven front-end process equipment, such as Rapid Thermal Processors, Plasma Asher Descum, Plasma Etcher,Sputtering deposition equipment.

Dielectric Dry Etch System that applies our own specialized plasma source technology.

Semiconductor: FOUP Cleaner, POD Cleaner, Wet Station, Chemical Delivery Supply System, Metal Lift Off, Cassette & Magazine Cleaner. Display: OLED Mask Cleaner, Glass Cleaner, Etcher & Stripper, Auto Macro Inspection, Stream-Jet Printing, Lamination M/C,

Single wafer processor, Wafer scrubber, hybrid wafer cleaner system

Poly Etcher System (Conductor Etcher System), Metal Etcher System, Oxide Etcher System (Dielectric Etcher System)

Wet Station, Ultrasonic Cleaner, Tube Cleaner and Parts Cleaner for semiconductor and FPD production parts cleaning equipment. Chemical Supply System

CMP (Chemical Mechanical Polishing), Wet Cleaning Systems. Display Equipment: Wet Station, APP (Atmospheric Pressure Plasma Cleaner), CO₂Cleaner, Coater & Track System. CMP Slurry and nano dispersion solution

OLED Sputter Production

Central Chemical Supply System / Wet System / Inkjet Printing System for semiconductor and display

EVAPORATION SOURCE (Point Source, Linear Source) and VACUUM SYSTEM (OLED System, Sputtering System)

Sputtering System, OLED System, Solar Module System, AMHS, AS/RS, 3D Printer, Converting Machine

ICP ETCHER, DRIE ETCHER, CCP ETCHER, LED ETCHER, NANO-IMPRINTER

Scrubbers for exhaust gases, chillers to control the processing temperature on the Fab equipment

Manufacture Furnaces. Refurbishment and relocation of diffusion furnaces and RTP equipment. Spare parts

OLED Display Manufacturing Equipment, Thin-Film Photovoltaic Cell Manufacturing Equipment, Vacuum Process Equipment

Semiconductor vacuum equipment and parts. Alignment, Bonding, Annealing, LC Filling, Vacuum Sealing Equipment. Glove box/ Gas purification equipment. Fluxless reflow equipment/ Reduction bonding equipment.

We design and manufacture advanced thin film deposition systems for Molecular Beam Epitaxy (MBE), UHV Magnetron Sputtering and Pulsed Laser Deposition.

Vacuum plasma equipment, Physical and thermal equipment,

Press welding heads (titanium, molybdenum, copper, ceramics, etc.), semi-automatic hot press, fully automatic hot press, pulse system modules, platform fixtures, semiconductor equipment and other related products.

Ion etching cleaning tools, plasma equipment