SiC epitaxial wafer
SiC epitaxial wafer
Poly-N-vinylacetamide
N-vinylacetamide homopolymer
VGCF™-H
vapor grown carbon fiber
HFC-23
tetrafluoromethane
FC-116
hexafluoroethane
FC-14
trifluoromethane
HFC-32
difluoromethane
FC-C318
octafluorocyclobutane
FC-218
octafluoropropane
FC-2316
hexafluoro-1,3-butadiene
boron trichloride
BCl3
chlorine
Cl2
hydrogen bromide
HBr
sulfur hexafluoride
SF6
ammonia
NH3
nitrous oxide
N2O
Clean-S PF
PFC removal equipment by Chemical Capture System
HICDS
PFC removal equipment by Catalytic Decomposition System
CleanS-Z
Dry-etching gas removal equipment
