Gases

Polypropylene (PP), high-purity terephthalic acid (TPA), polyketone (POK), as well as nylon, polyester, TAC films used for wrapping or industrial & optical use, and special gases like NF3, 20%F2/N2 used in semiconductors, displays

Rare Gas, Pure Gas, Mixture Gas

Ultra-pure special gases for semiconductors and displays.

Specialty Gas, Secondary Battery Materials, Inorganic Fluorine Compounds, Refrigerants

Gas and chemical materials for semiconductor and display manufacturing processes. Analysis for semiconductor and display processes and various industrial process gases.

nitrogen and electronics material gases as well as total solutions including related equipment in the global electronics sector.

Specialty gas and materials for semiconductors and displays. production and distribution of tungsten hexafluoride (WF6), monosilane (SiH4), dichlorosilane (SiH2Cl2), and disilane (Si2H6), NF3, photoresists.

Technologies for high-purity materials: oxide (Ge, P, and rare earth elements) doping quartz fiber light guides; optical elements based on polycrystalline zinc chalcogenides for power IR optics, CdHgTe MOCVD technology for photodetectors

Catalysts, adsorbents, specialty gases for semiconductor industry. Plant construction for these products.

high-purity electronic material formulations. Electroding, dielectric, ferroelectric and piezoelectric compositions are offered in target, substrate and powder form in the following compositions. Custom compositions are also available.

Cleaning, Etching and Photolithography SELECTIPUR® Series Chemical Mechanical Planarization (CMP) FOTOPUR® Series Wet Deposition

Specialty and semiconductor gases, such as Monosilane, Disilane, and Silicon Tetrafluoride. Backgrinding UV and non-UV Tapes IGROS(TM)

Manufacturing and supply of industrial gases

Precursor materials (including MO source), electronic special gas and photoresists for IC, LCD, LED, OLED, power devices, semiconductor lasers

SiC epiwafers, chemicals for etching and deposition gases, PFC and etching gas treatment equipment.

Electronic special gases, including C2F6, C4F6, CH3F, CHF3, COF2

Polysilicon, silane gas

Special gases and integrated services

High Purity Etching Gases, ALD/CVD Precursors, Copper Plating Materials

Total gas/chemical supplying systems and engineerings that support the semiconductor and FPD industries.