We install a "total gas center" with high purity nitrogen manufacturing equipment and electronics material gas supply systems adjacent to the customer's semiconductor and liquid-crystal manufacturing plants, and provide an around-the-clock stable supply of high purity nitrogen and material gases via pipelines.
We support our customers with total solutions by providing the installation of special piping for high purity specifications essential for the manufacturing process used by customers in the electronics industry, as well as related equipment including high purity gas purifiers, exhaust gas abatement systems, and cylinder cabinets.
Silicon Semiconductor・LCD
CVD
Gas name
SiH4 Silane PH3 Phosphine
B2H6 Diborane SiH2Cl2 Dichlorosilane
GeH4 Germane Si2H6 Disilane
SiH(CH3)3 Trimethyl Silane SiF4 Silicon Tetrafluoride
WF6 Tungsten Hexafluoride TiCl4 Titanium Tetrachloride
NH3 Ammonia N2O Nitrous Oxide
C3H6 Propylene
Cleaning and Etching
Gas name
NF3 Nitrogen Trifluoride CO Carbon monoxide
C2F6 Hexafluoro Ethane C3F8 Octafluoro Propane
C4F6 Hexafluoro-1,3-butadiene C4F8 Octafluorocyclobutane
C5F8
Octafluorocyclopentene CF4 Tetrafluoromethane
CHF3 Trifluoromethane COS Carbonyl Sulfide
C2HF5 Pentafluoroethane CH2F2 Difluoromethane
CH3F Methyl Fluoride ClF3 Chlorine Trifluoride
SF6 Sulfur Hexafluoride Cl2 Chlorine
BCl3 Boron Trichloride HBr Hydrogen Bromide
HCl Hydrogen Chloride HF Hydrogen Fluoride
Ion Inplant
SDS Safe Delivery Source
Gas name
SDS AsH3 Arsine SDS PH3 Phosphine
SDS 11BF3 Boron Trifluoride SDS SiF4 Silicon Tetrafluoride
SDS GeF4 Germanium tetrafluoride SDS H2Se Hydrogen Selenide
AsH3 mixture Arsine Mixtures PH3 mixture Phosphine Mixtures
BF3 Boron Trifluoride PF3 Phosphorus Trifluoride
SiF4 Silicon Tetrafluoride GeF4 Germanium Tetrafluoride
Compound Semiconductor
Gas name
AsH3 Arsine PH3 Phosphine
NH3 Ammonia TMG Trimethyl Gallium
TMA Trimethyl Aluminum
Gas name
SiH4 Silane PH3 Phosphine
B2H6 Diborane TMB Trimethylboron
GeH4 Germane NH3 Ammonia
H2Se Hydrogen Selenide NF3 Nitrogen Trifluoride
SF6 Sulfur Hexafluoride DEZn Diethylzinc
Gas name
SiHCl3 Trichlorosilane NO Nitric Oxide
H2 Hydrogen D2 Deuterium
Argon + Oxygen Mixture Gas Argon+Oxygen Mixture Gas Helium + Oxygen Mixture Gas Helium+Oxygen Mixture Gas
Argon + Methane Mixture Gas Argon+Methane Mixture Gas Nitrogen + Hydroge Mixture Gas Nitrogen+Hydrogen
Mixture Gas
Gas name
N2 Nitrogen O2 Oxygen
Ar Argon He Helium
CO2 Carbon Dioxide
Taiyo Nippon Sanso Corporation designs, manufactures and sells cylinder cabinets, bulk specialty gas systems (BSGS), purifiers,
abatement systems or scrubbers,monitoring systems, and piping for semiconductors, LCD, organic EL,
PV (photovoltaic cells), LED, SiC power devices, and MEMS.
供給装置
Cylinder cabinets
We provide cylinder cabinets that comply with the requirements
of the High Pressure Gas Safety Act and bulk specialty
gas systems (BSGS) that supply large volumes of specialty
material gas. These products are designed for universities,
research institutes, and mass production factories.
View details
Purifiers
We are a leading manufacturer of purifiers for nitrogen,
oxygen, hydrogen, argon, helium, and ammonia.
We offer a broad range of purification systems,
including systems based on normal temperature adsorption,
cryogenic adsorption, and gettering.
View details
Waste gas abatement system
We’ve been active in the development, design, and production of
gas abatement systems for many years.
Making the most of our expertise, we provide equipment designed
to meet the specific needs of individual customers.
