Clean Room Facility

Peltier Socket Chamber Temperature Control System, Peltier Socket Chamber Test Rack, DRAM Test Constant Temperature Chamber,

Real-time in-line monitoring of trace amounts of metallic contamination. Total solution of metallic, organic and ionic contamination monitoring for gases, chemicals and wafers in the semiconductor ecosystem

THC (Temperature & Humidity Controller), Dehumidifier, CHR (Chiller)

CHILLER, HEAT EXCHANGER, SCRUBBER, TEST CHAMBER. RETAINER RINGS and OTHER PROCESSING PARTS

Scrubbers for exhaust gases, chillers to control the processing temperature on the Fab equipment

Chillers, Process Ambient Control. Process control for fluid delivery and wafer environment control

Gas Cabinets, Gas Abatement Systems, Process Containers

Semiconductor vacuum equipment and parts. Alignment, Bonding, Annealing, LC Filling, Vacuum Sealing Equipment. Glove box/ Gas purification equipment. Fluxless reflow equipment/ Reduction bonding equipment.

Clean room air purification, high-precision control of temperature and humidity and the reduction of fluctuations in the magnetic field. Cleaning and drying technologies for the cleaning of wafers, quartz tubes, and tools.

nitrogen and electronics material gases as well as total solutions including related equipment in the global electronics sector.

FFU- Fan Filter Unit, Cleanroom, Clean room supplies, modular cleanroom, Clean room system, clean room equipment、Clean Booth、Cleanroom Ceiling System、Tool Partition System、Cleanroom Lighting Unit, Climate unit for cleanroom

Design, construction and providing integrated solutions for clean air, processing environment control mini-enviroment equipment,micro-contamination inspection,system engineering,and ESCD (intelligent building) service.

Clean air solutions, Molecular Contamination Control (MCC)

Photolithography equipment, Photomask making equipment, Chemistry equipment, Washing and drying equipment for wafers and substrates, Vacuum and plasma equipment, Control, Testing and Measuriung equipment, Solar cell test equipment, Local clean zones.

bulk and local chemical dispensers, (manual/Semi-Auto/Linear) wet process stations, Kem-Karts for Slurry and chemical transport, waste collection and bottle wash stations.

Virtual clean room environment for advanced prototyping and pilot-line production. Spin Coaters, Bake Plates, Spin Developers/Clean, Temporary Bond & Debond.

Cleanliness and contamination control related products and services. Consulting, equipment, supplies, laboratory construction, training.

Environmental Test Chambers. Semicon equipment: Insulation Resistance/ Leakage Current Evaluation, Conductor Resistance Evaluation, DC Current Applying Test, Burn-in and Cycling Systems for memory, automotive.

Semiconductor temperature control device series (Chiller), robot series (Wafer Sorter / AMR), local scrubber (Local Scrubber) and other special equipment, is now widely used in semiconductors, LED, LCD and other fields

Full engineering service for process and mechanical systems in semiconductor, solar, pharmaceutical and disk media industries. High Purity gas system installations.