MOLECULAR CONTAMINATION CONTROL
Camfil Molecular Contamination Control (MCC) operates globally in North America, Europe, the Middle East and Asia. The MCC division delivers molecular filtration solutions in light processes, industrial applications, cleanrooms and large installations concerned with indoor air quality, such as airports.
You’ve probably heard about sulphur dioxide, hydrogen sulphide, nitrogen dioxide, ozone, kerosene, formaldehyde and ammonia. How about polyaromatic hydrocarbons, volatile organic compounds (VOC), benzene, isocyanates and siloxanes? These are a few examples of chemicals present in gas form in the atmosphere either outdoor or inside buildings. They all require molecular filtration to protect people, processes or machinery, or simply to remove odours. In fact, there are more than 130 million registered chemicals in the world today, and our list of references and applications keeps growing.
WE PROVIDE SOLUTIONS IN THESE MAIN AREAS:
Corrosion Control: Protection of sensitive electrical process control systems from acidic gases in petrochemical, pulp and paper, metal refining, printed circuit board manufacturing, data centres and wastewater treatment facilities. Corrosion control is also important for protecting artefacts in museums and storage facilities.
Microelectronic: Yield enhancement for semiconductor wafer manufacturing, flat panel displays, hard disk drives and equipment. Protection from outdoor and process chemicals present at trace levels in the air.
Indoor Air Quality: Protection of people staying inside buildings like airports, offices, hospitals or laboratories.
Exhaust: Protection of people and the environment from odours and toxins emitted in exhaust air streams from industrial facilities.
Additionally, we are a world leader in molecular filtration for nuclear facilities and special applications requiring safe change housings.
VERSATILE, ROBUST & EFFICIENT PRODUCTS SPECIALLY DESIGNED & TESTED
The corrosion control product range is supported by a comprehensive range of filters, sales tools and site services. We are a leading manufacturer of UL-certified activated alumina adsorbents (CamPure™) as well as plastic modules (CamCarb™), housings for filters and adsorbents (PSSA, VDBs) or analytical services (corrosion coupons, ISA Check online monitors, media post-mortem tests).
For the last 20 years, we have revolutionised molecular contamination control in microelectronic facilities with the introduction of GigaPleat™, the cleanest product on the market designed for cleanroom applications where activated carbon particle emissions and outgassing cannot be tolerated. GigaPleat is available with a wide range of adsorbent media such as ion exchange resins or activated carbon, adapted to the different chemicals observed in microelectronic facilities including, acids, bases, condensables, oxidants, VOC, dopants and refractory compounds.
Heavy-duty products are most often applied to the exhaust field with a range of so-called deep bed products (ProCarb) for high loads and/or very high removal-efficiency requirements, as well as containment applications (ActiCarb). Finally, our versatile product line also includes combination filters for air handling units with limited space to control both particulate matter and gaseous chemicals within a single filter stage (CityCarb).
All these products are specially designed and tested with chemicals relevant to each application. Our unique ISO 10121 molecular test rigs for full filter sizes as well as our lifetime calculation and design software bear witness to our 55 years of experience in this field and help to ensure proper dimensioning and guaranteed results.
Improve your process yield with complete solutions for advanced semiconductor manufacturing.
In semiconductor fabs, microcontamination can pose massive problems. Camfil offers an extensive range of solutions – particle pre-filters, HEPA and ULPA filters and AMC control solutions – to lower any cleanroom particulate and molecular concentrations to ISO Class 1 levels for particles and sub-ppb for AMC.
AMC FILTERS AND CONTROL MORE CRITICAL THAN EVER IN CLEANROOM FILTRATION
Airborne molecular contamination (AMC) presents a special challenge to semiconductor manufacturing in small dimensions. The undesired chemical reactions of acids, bases, organics, refractories and dopants can affect wafer surfaces and process equipment optics to create defects during chip production and reduced equipment and tool efficiency.
AMC is steadily becoming more important in critical cleanroom manufacturing processes. As specifications become more demanding and device sizes shrink, process control faces tremendous pressure. Wafers can spend an entire month inside a factory, undergoing hundreds of processes before being shipped in a final product. Any tiny contamination impact in this process chain can have serious consequences for the fab’s overall yield.
Another challenge lies in the generalization of larger wafer dimensions, which drives up the cost of individual wafers and increases the need for nanoparticle and AMC protection at the tool level. Additionally, the rising costs for defect-free masks used in EUV and multi-patterning DUV lithography are putting pressure on contamination control systems for facilities as well as mini-environments like inspection equipment and mask stockers.
PROTECT YOUR PROCESS EQUIPMENT AND WAFERS AGAINST NANOPARTICLES AND AIRBORNE MOLECULAR CONTAMINANTS
Camfil solutions provide field- and lab-proven protection in semiconductor manufacturing environments, including lithography, etch, diffusion, metallization, thin films, ion implantation, inspection tools, and reticle or wafer storage areas.
Process tool air filters
Cleanroom air filters
Scanner prefiltration systems
ENERGY-EFFICIENT AND LOW-OUTGASSING SOLUTIONS FOR FACILITY SYSTEMS
Camfil’s particle pre-filter range ensures the lowest energy usage in make-up air handling units while protecting HEPA filters from clogging and without releasing Boron. Camfil HEPA and ULPA filters are designed to release the lowest possible amounts of organic contaminants (so-called low outgassing), following years of developments of adhesives and media chemical properties. Exhaust systems for wafer cutting as well as gas scrubbers for general exhaust back-up systems protect the environment from process contamination.
Boron-free synthetic pre-filters
Very low energy pre-filters
Low outgassing HEPA and ULPA filters
Dust collectors and gas scrubbers for cleaner exhaust air
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BROCHURE MICRO ELECTRONICS
Make up air unit
MAKE UP AIR UNIT
Air handling units that provide conditioned outdoor air to industries are a critical parts of facility systems, to create room overpressure and compensate for exhaust air. Make up air needs proper filtration for protecting coils and ducts, people, processes and products.
Microelectronic processes in cleanrooms or mini-environments require protection from particles and molecular gaseous contaminants. Processes include lithography, coater developers, etch, diffusion, metallization, thin films, ion implantation, inspection tools and reticle stockers.
Recirculation air unit
RECIRCULATION AIR UNIT
Recirculation air units are used to provide clean and tempered air to facilities, as complement or in place of ceiling systems and fan filter units. Recirculated air needs filtration for protecting people, processes and products.
Protect the environment and people from dangerous or high concentrations of particles and molecules released by industrial processes, comply with local safety regulations and reduce operating costs of your exhaust air filtration system.
Cleanroom ceilings are designed to provide high protection levels against molecules (gas phase), nanoparticles and particles for cleanroom equipment, processes and manufactured products. Ceilings use laminar or turbulent air flows depending on the cleanroom design.