TEMC is a professional materials company that manufactures specialty gas for semiconductors and displays.
| Gas | Purity | Cyl Size | Contents | Valve Type |
|---|
| Ne | 6N (99.9999%) | 47L | 7000 L | CGA580, JIS22R |
|---|
| Xe | 5N5 (99.9995%) | 47L | 10,000 L | CGA580, JIS22R |
|---|
| Kr | 5N5 (99.9995%) | 47L | 7,000 L | CGA580, JIS22R |
|---|
TEMC is a professional materials company that manufactures specialty gas for semiconductors and displays.
| Gas | Purity | Cyl Size | Contents | Valve Type |
|---|
| C4F6 | 3N5 (99.95%) | 47L | 45 kg | CGA350, JIS22L |
|---|
| CO | 4N5 (99.995%) | 48L (Aluminuim) | 13 ~ 15MPa | CGA350, JIS22L |
|---|
| CHF3 | 5N (99.999%) | 47L | 35 kg | CGA660, DISS716 |
|---|
| COS | 3N (99.9%) | 47L | 40 kg | CGA330 |
|---|
| 11BF3 | 3N (99.9%) | 2.3L | 1.9 kg | Customer Standard |
|---|
| C4F8 | 5N (99.999%) | 47L~440L | 50 kg | JIS22R |
|---|
| C3F8 | 4N (99.99%) | 47L | 40 kg | CGA660 |
|---|
| CH2F2 | 5N (99.999%) | 47L | 30 kg | JIS22L |
|---|
※ Package can be modified under revision according to customer’s request
TEMC is a professional materials company that manufactures specialty gas for semiconductors and displays.
| Gas | Purity | Cyl Size | Contents | Valve Type |
|---|
| Excimer Laser Mix | 10ppm-10% F2, HCI, Xe
BCI3, Kr, Ar in Ne Balance | 47L~49L | 6,000 ~ 7,500L | CGA580, CGA679,
DISS718, DISS728 |
|---|
| F2 Mix | 0.1%-20% F2 in
N2, He, Ne Balance | 47L~49L | 50 kgf/cm2 | CGA679, JIS22R |
|---|
| 11BF3 Mix | 1%-50% 11BF3 in
H2, He, N2 | 2.3L~6.6L | 1800 psi | SCV Valve |
|---|
| SiH4 & Si2H6 Mix | 10ppm-50% SiH4 or Si2H6
in N2, H2 Balance | 47L | 1800 psi | CGA350 DISS632 |
|---|
| INERT Mix | 10ppm-90% Inert Gas in
N2, Ar, H2, He Balance | 47L | 2000 psi | Customer Standard |
|---|
| BCI3 Mix | 0.1%-10% BCI3 in
N2, He Balance | 47L | 23-100 kgf/cm2 | CGA660 |
|---|
| B2H6 Mix | 10ppm-30% B2H6 in
N2, H2 Balance | 47L | 2000 psi | CGA350 |
|---|
※ Package can be modified under revision according to customer’s request
