Factory Monitoring & Control Systems (FMCS)

POU Abatement System, RTO (Regenerative Thermal Oxidizer), IES (Ion Exchange System)

Real-time in-line monitoring of trace amounts of metallic contamination. Total solution of metallic, organic and ionic contamination monitoring for gases, chemicals and wafers in the semiconductor ecosystem

Abatement and Liquid Delivery System

Wet Station, Ultrasonic Cleaner, Tube Cleaner and Parts Cleaner for semiconductor and FPD production parts cleaning equipment. Chemical Supply System

Automated storage and retrieval system (AS/RS) Shuttle system Uni-SHUTTLE HP 3D robot warehousing system ALPHABOT Smart AGV Premex XIO Automated forklift Premex SLX Self-driving carriage-mounted Automated forklift Premex SLX with SVS AGV (automated guided

Chillers, Process Ambient Control. Process control for fluid delivery and wafer environment control

Wafer box, wafer carrier, wafer cassette, wafer carrier handle, RSP (reticle SMIF pod), RSP opener, mask case, chip tray, fluoro valves, cleanroom supplies, wafer and cassette cleaning systems

SIMPL- SEM Image Metrology PLatform, Process control monitoring : Image Quality (IQ), Process control monitoring : IC-Metric, Mask Data Preparation

Water treatment and intelligent control technologies developed by chemical engineering, electrical engineering and environmental engineering professionals

Select product type to view detaiiB Series, Air cylinders and hands, Air valves, Air filters / Regulators, Speed controllers / Fittings / Others, Vacuum equipment / Vacuum pads, Cleansystems

Industrial Automation Control and Distributed Control Systems and Software, Pressure Transmitters, Flowmeters, Controllers (Temperature Controllers) / Recorders / Communication Gateways, Switches and Sensors, Diagnosis of Factory and Plant Equipment

Test head manipulators, docking and electrical interface products that are used by semiconductor manufacturers to test integrated circuits and wafers.

Gas Cabinets, Gas Abatement Systems, Process Containers

Clean room air purification, high-precision control of temperature and humidity and the reduction of fluctuations in the magnetic field. Cleaning and drying technologies for the cleaning of wafers, quartz tubes, and tools.

Manufacturing Execution System (MES), Statistical Process Control (SPC), Equipment Automation Program (EAP), Receipt Management System (RMS), Data Analysis System (EDA), Fault Detection & Classification(FDC) and Master Data Management (MDM).

nitrogen and electronics material gases as well as total solutions including related equipment in the global electronics sector.

Chemical Dispense System, Chemical Mixing and Dispensing System, Chemical Dilution and Dispense System, Waste Chemical Collection System, Chemical Regeneration and Recycling Equipment, System Installation and Piping Operations, System Maintenance

Design, construction and providing integrated solutions for clean air, processing environment control mini-enviroment equipment,micro-contamination inspection,system engineering,and ESCD (intelligent building) service.

Air pollution control including Volatile Organic Compounds (VOCs) abatement system, inorganic acid and alkali scrubber, clean room Airborne Molecular Contamination (AMC) control, high boiling point VOCs solvent recovery, acid / alkaline/smoke

Air abatement system design & installation and exhaust hookup service for high-tech Fabs, vacuum chambers and associated precision components & modules applied on PVD & CVD process equipments for Semiconductor, Display, Solar