Lamps for Lithography

Deep-ultraviolet (DUV) light sources. Excimer lasers using argon fluoride (ArF) or krypton fluoride (KrF) gases to generate light in the deep-ultraviolet spectrum.

Semiconductor inspection equipment, Various lamps, Light source equipment

Light sources and light units (LED, laser, lamp). Lithography tools and aligners. UV curing systems.

Quartz, ceramic products for semiconductor. EUV lamps manufacturing. Quartzware cleaning.

Optical System / equipment: UV light sources, Laser Oscillators EO Glass: Color Glass Filters, Opto-Electronics Glass

Development and production of innovative light sources, spectrometers and optical radiation detectors in a wide wavelength range: from near infrared (NIR) to ultraviolet (UV).

EUV and plasma sources, EUV VUV and X-ray metrology equipment, modelling and simulation.

EUV light sources for lithography and optics research and development.

Manufacturer of lithography equipment