KLA-Tencor Legacy Tool Support
Lower your cost of maintaining metrology equipment and systems. Wafer Inspection Services, Inc. offers comprehensive semiconductor metrology legacy support.
OEM SYSTEMS SUPPORTED:
UV1250SE
UV1280SE
Aset F5X
Spectra FX 100
Spectra FX 200
Surfscan 6200; 6220; 6400; 6420
AIT Series
PUMA
SP1, SP1-TBi, SP1-DLS
2135; 2138; 2139; 2360;2365
METROLOGY LEGACY SUPPORT SERVICES:
Audits
Installations & Deinstallations
Lock down / Prep for shipment
Applications, Metrology, Operator & Maintenance Training
Preventative & Corrective Maintenance
Technical Support
Per Call Service
Full Time On Site Service
Training
Operator Training
Applications Training
Maintenance Training
