Other Wafer Process Equipment

UV irradiator, Wafer Laminator, Tape Mounter, Plasma Cleaner. Semiconductor Factory Automation: OHT, Stocker, Bonding Automation. Precision machined equipment parts.

EUV HVM Reflectometer, EUV Accelerated Exposure Tool, Actinic Image Review System (AIRES®), EUV Pellicle Transmission Measurement System, EUV Pellicle High-Speed Mapping Tool, EUV N&K and Phase Measurement Tool, EUV Resist Outgassing Tool

Wafer and Substrate Mounters (Manual and Semi-automatic), Table-top UV Irradiators, Expanders, CO2 Bubblers, Transformers and other process automation equipment

Central Chemical Supply System / Wet System / Inkjet Printing System for semiconductor and display

ICP ETCHER, DRIE ETCHER, CCP ETCHER, LED ETCHER, NANO-IMPRINTER

Nanoimprint lithography (NIL) tools, resists, masks, and processes for a variety of NIL including thermal and photo-curable NIL, as well as direct imprinting of materials.

Thermal equipment, Plasma Systems, Wafer and Panel Lamination and Bonding Machines

Equipment for wet surface treatment (Capacity: 100L or below), testing and analyzing equipment for wet surface treatment, surface treatment related products (equipment, materials and chemicals).

Ball Transfer and Turn Tables

Wafer manufacturing equipment. LCD mnfr equipment, Wafer mounter and BG tape removal machines, dry lift-off machines, wafer and pkg substrate tape lamination and removal machines, UV irradiation equipment, film resist lamination machines.

Wet Cleaning Systems and Chemicals, UV Ozone Cleaner, Wafer Mounter, Wafer Expander, Grip Ring, UV Curing System

Crystal growing furnaces (Si, GaAs, Sapphire) and parts, wafer laser marking machine, wafer handling manipulator, wafer diffusion furnace, thermal process equipment, quartz crucible manufacturing equipment.

Mask Aligners, UV Exposure Systems, Solar & Photovoltaic, UV Meters, Resistivity Meters

bulk and local chemical dispensers, (manual/Semi-Auto/Linear) wet process stations, Kem-Karts for Slurry and chemical transport, waste collection and bottle wash stations.

Wafer transfer system ( SORTER/EFEM) technology, Standard Mechanical Interface(SMIF) technology, ultra-clean automation/ EUV automation technology, wafer surface curing processes, AGV, wafer ultra-clean automation storage system, and RFID tracking system.

Customized systems for Thin Film PVD and Etch. Small R&D/pilot project systems, large production systems utilizing processes such as Ion Beam Etching, Sputtering, Electron Beam Evaporation and Thermal Evaporation fiber-optic coating and more.

Automatic Wafer Loader, Automatic, Semiauto and Manual Wafer Mounter, Automatic and Manual Wafer ID and Frame ID Reader and Automatic Wafer Packer / Unpacker / Sorter

Photoresist coating and developing machines, die bonder, wire bonder, DI water equipment, dicing film laminator, dicing saw, wafer expander, UV film curing,

Wet process stations, Resist processing equipment, Dicing equipment, PCB processing equipment

Auto wafer mounters, taping, laminator & presses, expanders, UV irradiators, breakers, grinding machines, lapping machines, polishing machines, and other tailor-made equipment in the LED, semiconductor, optical communication (5G)