Transfer Systems for Wafers, Reticles or FPD

Ball Transfer and Turn Tables

Crystal growing furnaces (Si, GaAs, Sapphire) and parts, wafer laser marking machine, wafer handling manipulator, wafer diffusion furnace, thermal process equipment, quartz crucible manufacturing equipment.

Wafer transfer system ( SORTER/EFEM) technology, Standard Mechanical Interface(SMIF) technology, ultra-clean automation/ EUV automation technology, wafer surface curing processes, AGV, wafer ultra-clean automation storage system, and RFID tracking system.

Backend Semicon Equipment: Saw and Place, Pick and Place, L/F loader, Trim/Form/Singulation, Strip/Wafer Mount System, Wafer Taping/Detaping System, Cam Press Trim/Form System. Vision Inspection Systems, Inline Assy System, Ultrasonic Welding System.

Process cassettes. Automated and manufal wafer handling products. Bulk aligners. Mask picks, inspection stations, RSP openers.

Semiconductor and electronics handling robots. These robots are built for use in cleanroom applications, including ISO Class 1.

AMR robotic solutions for semiconductor industry.

Robots for FPD transfer, wafer transportation. RF and microwave power supplies and material handling equipment for semiconductor and flat panel manufacturing systems. Solar Inverter.

Die sorter, wafer transfer system, robotic dispensing system.

Direct metal bonding system for IGBT module, Reticle mask stocker, Non-contact wafer thickness measuring system, Wafer transfer system.

Automated Load Lock Integrated Systems, Vacuum Transfer Integrated Systems, Atmospheric Robotic Arms, Atmospheric Elevators, Atmospheric Cassette Load Ports, Vacuum Robotic Arms, Vacuum Elevators, Vacuum Aligners, Vacuum Cassette Load Ports.

Wafer handling equipment manufacturer with a extensive experience on semiconductor industry.

Manufacturer of batch horizontal and vertical diffusion, PECVD and LPCVD furnaces for the semiconductor and photovoltaic industries.