Evolutionary bearings able to move machinery in special environments
Semiconductors, liquid crystal and their component, high-performance film, are an accumulation of state-of-the-art technologies and indispensable to our modern day lives. The performance of these products is improving day by day and the parts used in the manufacturing equipment that make such products are required to operate in extremely harsh environments, such as clean, high-temperature and corrosive environments. "Special Environment Bearing Series Ceramic Bearings - EXSEV Bearings" are bearings developed by leveraging material, surface treatment and lubrication technologies to withstand a variety of tough environments.
Related product types
Deep Groove Ball Bearings
Angular Contact Ball Bearings
Special Environment Ball Bearings
Product list
Bearings for thermal processing film formation equipment
Related product types：
Special Environment Ball Bearings (EXSEV series)
Thermal processing film formation equipment adopt special bearings capable of lubrication even at high temperatures.
Bearings for exposure equipment
Related product types：
Special Environment Ball Bearings (EXSEV series)
Bearings of exposure equipment are used in strong magnetic fields therefore are made from non-magnetic ceramic.
Bearings for etching equipment
Related product types：
Special Environment Ball Bearings (EXSEV series)
Bearings of etching equipment are exposed to etching solution during operation, therefore corrosion-resistant ceramic bearings and stainless steel are adopted.
Bearings for ion injection equipment
Related product types：
Special Environment Ball Bearings (EXSEV series)
Clean bearings that do not generate impurities due to wear, etc. through lubrication in a vacuum are adopted in the vacuum chamber of ion injection equipment.
Bearings for sputtering equipment
Related product types：
Special Environment Ball Bearings (EXSEV series)
The high-temperature clean pro bearing is used in the high-temperature vacuum section of sputtering equipment.
Bearings for CMP equipment
Related product types：
Special Environment Ball Bearings (EXSEV series)
Bearing of CMP equipment are used in environments exposed to abrasive, therefore corrosion-resistant ceramic bearings and PTFE-coated bearings are adopted.
Bearings for inspection equipment
Related product types：
Special Environment Ball Bearings (EXSEV series)
A non-magnetic bearing is adopted in inspection equipment so as not to affect inspection results.
Bearings for wafer transfer equipment
Related product types：
Special Environment Ball Bearings (EXSEV series)
Wafer transfer equipment demands low particle emission and long life. As such, ceramic bearing combined with the thin-wall K-Series full complement ball type are adopted.
Bearings for LCD polarizing plate film production equipment
Related product types：
Special Environment Ball Bearings (EXSEV series)
Various solutions such as acids, alkalis, dyes and pure water are used in the polarizing plate film production line
