Non-Contact Flow Sensors & Air Bubble Detectors
For the Semiconductor Industry
In the semiconductor industry the compact sensors from SONOTEC play an important role in wafer manufacturing. In different wet processes several abrasive, adherent, corrosive, and ultra-pure liquids are used. The advantage of the sensors is their non-invasive and non-intrusive measurement. Therefore they are ideal to both flow measurement and air bubble detection.
Flow Measurement in the Semiconductor Industry
If a cleaning solution is under- or overdosed, additional resources are required, since the cleaning process needs to be repeated. At worst, the wafers must be discarded and a huge loss in value is incurred. A precise flow measurement is therefore decisive for an efficient use of the production resources.
Clamp-On Flow Sensors & Inline Flow Meters
Non-contact ultrasonic clamp-on flow sensor SEMIFLOW CO.65
ULTRASONIC CLAMP-ON FLOW SENSOR
SEMIFLOW® CO.65
Non-contact ultrasonic clamp-on flow sensor SEMIFLOW CO.66 PI Ex1
ULTRASONIC CLAMP-ON FLOW SENSOR
SEMIFLOW® CO.66 PI Ex1
Utrasonic inline flow sensor SONOFLOW IL.52 for utra-low flow measurement
ULTRASONIC INLINE FLOW METER
SONOFLOW® IL.52
BROCHURE
Ultrasonic Sensors for the Semiconductor Industry
Air Bubble Detection in the Semiconductor Industry
The presence of air bubbles in critical processes can have extensive consequences in wafer manufacturing. In photolithography the occurrence of air bubbles in photoresist may cause a defect of the wafers; air bubbles in process coolant may lead to an interruption of production processes. A timely detection of air bubbles is therefore crucial to achieve production targets.
Air Bubble Detector
Air Bubble Detector SONOCHECK ABD06
ULTRASONIC BUBBLE DETECTOR
SONOCHECK® ABD06
