Measurement technology on the highest level
High purity, media resistance, leak tightness and accuracy as well as the SEMATECH and SEMI standards all make up the basic requirements for the development and production of our measuring instruments for the semiconductor industry.
Our product range offers tailor-made solutions for pressure measurement in gas, chemical and solvent supply systems. Through our innovative product design, characterised by the low dead volume and excellent purge properties of the sensing surfaces, reduced start-up and maintenance times are possible.
For hazardous areas, in order that measurements can be made in accordance with appropriate laws and directives, we offer instruments in ATEX- and/or FM-approved designs.
Gas distribution systems (gas sticks, gas panels, bulk-gas supply)
Ultrapure water supply
Liquid chemical supply
Level measurement of liquid gases and solvents