EtherCAT is well established in the semiconductor industry: twelve of the thirteen market-leading manufacturers of wafer-level production equipment are members of the EtherCAT Technology Group (ETG) and use EtherCAT in their machines and systems. Industry leader Applied Materials was a founding member of the ETG and is represented on the association's Board. Large semiconductor manufacturers are now prescribing EtherCAT for their new production facilities. EtherCAT is the SEMI™ standard, and the ETG's very active Semiconductor Technical Working Group has developed a whole range of industry-specific device profiles. Safety over EtherCAT has also found its way into the fabs.
Beckhoff is the inventor of EtherCAT and a pioneer in PC-based control and modular I/O components. No other manufacturer has more EtherCAT expertise or offers a greater variety of EtherCAT devices. TwinCAT is the gold standard for EtherCAT masters, and of course every EtherCAT device supplier uses the TwinCAT software as reference.
Beckhoff solutions are represented in the entire spectrum of the semiconductor industry: whether front-end or back-end, whether chips or photovoltaics, from wafer transport to assembly systems. Beckhoff has the right I/O modules, scalable controllers, powerful drive technology and compelling software solutions for all applications – naturally combined with EtherCAT, the “must-have” in this industry. It goes without saying that, as a reliable partner to the semiconductor industry, Beckhoff is also familiar with the special requirements of this industry, such as "Copy Exact".
Beckhoff technology highlights for the semiconductor industry
EtherCAT | The ultra-fast communication system
EtherCAT is by far the fastest Industrial Ethernet technology. Added to this is the outstanding synchronization accuracy in the order of nanoseconds.
EtherCAT is by far the fastest Industrial Ethernet technology. Added to this is the outstanding synchronization accuracy in the order of nanoseconds.
With more than 6,000 members (as of October 2020), ETG is now the world's largest industrial fieldbus user organization.
With more than 6,000 members (as of October 2020), ETG is now the world's largest industrial fieldbus user organization.
In 2016 the EtherCAT P extension set a further milestone with the transfer of EtherCAT communication and supply voltage (2 x 24 V) on a standard Cat.5 cable. This concept becomes the basis for machines without control cabinets.
In 2016 the EtherCAT P extension set a further milestone with the transfer of EtherCAT communication and supply voltage (2 x 24 V) on a standard Cat.5 cable. This concept becomes the basis for machines without control cabinets.
EtherCAT G represents the continuation of the EtherCAT success story at speeds of 1 Gbit/s or 10 Gbit/s, which are now feasible. The EtherCAT protocol itself remains unchanged.
EtherCAT G represents the continuation of the EtherCAT success story at speeds of 1 Gbit/s or 10 Gbit/s, which are now feasible. The EtherCAT protocol itself remains unchanged.
Special acceptance in the semiconductor industry: EtherCAT is SEMI™ standard
Beckhoff launched the EtherCAT technology in 2003. The EtherCAT Technology Group (ETG) was established with the support of 33 founding members, including Applied Materials. Since then ETG has been dealing with the standardization and maintenance of the technology. With more than 6,000 members (as of October 2020), ETG is now the world's largest industrial fieldbus user organization. In 2005, the Safety over EtherCAT protocol supplemented the EtherCAT specification with the capability to transmit safety-relevant data. The protocol is particularly lean in its implementation, but completely independent of the communication system used (black channel). In 2007 EtherCAT became the IEC standard and the SEMI™ standard. 2011 saw the launch of ETG's Semiconductor Technical Working Group, in which users and manufacturers develop and maintain special device profiles for the semiconductor industry in 11 task groups. This not only guarantees the openness of the system, but also demonstrates its high acceptance in the semiconductor industry. To this day the EtherCAT specification has never been changed, only extended in a compatible manner. This means that today's devices can still be operated in networks dating back to 2003, so there are no versioning problems.
In 2016 the EtherCAT P extension set a further milestone with the transfer of EtherCAT communication and supply voltage (2 x 24 V) on a standard Ethernet cable. This concept became the basis for machines without control cabinets. In 2018 a big step towards higher transfer rates was taken with EtherCAT G/G10. The integration of the existing EtherCAT device range is a main requirement. Among other things, the branch concept was introduced for this purpose.
Exceptional performance
EtherCAT is by far the fastest industrial Ethernet technology. Added to this is the outstanding synchronization accuracy in the order of nanoseconds. Of course, all applications in which control or measurement tasks are performed via the bus benefit from this. Thanks to the significantly reduced response time, all applications in which switching conditions occur are also more efficient. In addition, the EtherCAT system architecture reduces the load on the controller: with the same cycle time, CPU load reductions of 25 to 30% are typical compared to other bus systems. Used correctly, the EtherCAT performance leads to higher accuracy and higher throughput and thus lower costs.
Flexible topology
With EtherCAT it is not the bus system that determines the network topology, but the system structure. No switches or hubs are required, which means there is no limit with regard to cascading. With EtherCAT there are practically no restrictions in terms of the bus topology: line, tree, star, and any combination thereof are possible, with almost any number of nodes. Thanks to automatic link detection, nodes and network segments can be disconnected and reconnected during operation, even at another point in the network. For line redundancy, the line is complemented to form a ring. On the master side, in addition to software only a second Ethernet port is required for this purpose; slave devices support redundancy in any case. This also makes it possible to replace devices during operation.
Simple and robust
Configuration, diagnostics and maintenance are significant cost factors. The EtherCAT Ethernet fieldbus greatly simplifies these tasks: if desired, EtherCAT assigns node addresses automatically, without the need for manual intervention. Low bus load and a peer-to-peer setup maximize electromagnetic compatibility. Any faults are not only reliably detected, but also precisely located. This shortens the time required for troubleshooting. Deviations from the planned layout are immediately detected by means of a target/actual comparison on system startup. The outstanding EtherCAT performance also comes in handy for the configuration: in contrast to other systems, no network tuning is required. And thanks to the large bandwidth, the system can easily cope with additional TCP/IP traffic. Since EtherCAT itself is not TCP/IP-based, there is no need to manage MAC or IP addresses, nor a need for IT experts to handle switch or router configuration.
Integrated safety
Functional safety as an integral part of the network architecture can easily be achieved with Safety over EtherCAT (FSoE). The technology is tried and tested, as evidenced by the fact that TÜV-certified devices have been available since 2005. FSoE meets the requirements of SIL 3 and SEMI™ S2 and is suitable for both centralized and decentralized safety controllers. Thanks to its black channel approach and a particularly compact safety container, FSoE can also be used on other buses. The integrated approach and the lean protocol result in low system costs. Non-safe control systems may “listen in” and evaluate the safety-relevant data.
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Safety over EtherCAT | Safe communication
Beckhoff product highlights for the semiconductor industry
I/O │ EtherCAT plug-in modules: efficient implementation of series production
Automation │ TwinSAFE seamlessly integrates safety technology into the controller
I/O │ ELM series: EtherCAT measurement modules
Motion │ XPlanar: the free-floating transport system
Motion │ Compact drive technology: connection of motors directly in the I/O system
With a comprehensive portfolio of compact drive technology components, Beckhoff meets the industry's requirements for low space requirements for machines and control cabinets.
With a comprehensive portfolio of compact drive technology components, Beckhoff meets the industry's requirements for low space requirements for machines and control cabinets.
The integrated servo drive AMI812x combines servo motor, servo amplifier and fieldbus connection in a space-saving design for all motion requirements in the power range up to 400 Watt.
The integrated servo drive AMI812x combines servo motor, servo amplifier and fieldbus connection in a space-saving design for all motion requirements in the power range up to 400 Watt.
Efficient and high-torque
Semiconductor manufacturing systems usually have many servomotors and stepper motors, each with relatively low power. Conventionally these are controlled by special drive controllers. Beckhoff enables this functionality to be integrated directly into the modular I/O stations. This saves space and reduces complexity.
For the low voltage range up to 48 V DC Beckhoff offers a modular system for compact servo and stepper motor drive solutions. Together with the AM8100 motor series, the EJ72xx EtherCAT plug-in modules, EL72xx servo terminals or the EP72xx series EtherCAT Box modules form an extremely small, highly dynamic servo axis that is suitable for precise positioning applications with One Cable Technology (OCT) and multi-turn absolute value encoder. The safety-related function STO (Safe Torque Off) is offered as an option for compact drive technology.
The AS2000 and AS1000 stepper motors can be operated in conjunction with the EJ70xx plug-in modules or the EL70xx Bus Terminals in IP 20 or with IP 67 EtherCAT Box modules as an adjustable axis, optionally with or without feedback. The AS2000 stepper motors are characterized by a high degree of protection and integrated connection technology.
Decentralized and versatile
The AMI8100 series combines the servomotor with an integrated high-efficiency servo drive. As an EtherCAT slave, the AMI8100 can be placed directly on the machine without control cabinet and without upstream I/O level, whereby compact machines without control cabinets can be implemented. The monitoring is indicated by the integrated status LEDs. The safety-related function STO (Safe Torque Off) is offered as an option for compact drive technology.
The AA1000 linear actuators are equipped with an integrated 48 V servo drive and can be installed decentralized in the machine. The integrated absolute encoder eliminates the need for additional limit switches or external measuring systems for operation, making integration even easier.
Planetary gear units for compact drive technology and stepper motors
The low-backlash economy planetary gear units from the AG2250 series, in straight and angled versions are with a variety of transmission ratios an economical solution for all mechanical engineering requirements. They are optimally matched to the Beckhoff AM8100 and AS2000 products. Special AG1000 series planetary gear units are available for the AS1000 stepper motors.
A comprehensive and optimally matched range of accessories complements the compact drive technology portfolio. The motion software products provide optimum support for machine manufacturers in the selection and commissioning of suitable hardware components for their drive solution.
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