Established in 2004, Siargo is dedicated to proprietary MEMS sensing products for medical, personal healthcare, utility, instrumentation and automation applications. We provide the solutions from key sensing components to system level products with flexibility of full customization. Current offers include gas sensing with IoT and sensor networking, microfluidic metrology, and industrial gas management with IoT.


Flow Sensors and Meters 
Microfluidic Sensors 
Pressure Sensors

MEMS MASS FLOW SENSORS AND METERS FOR CLEAN GASES


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The MEMS mass flow sensors are made with the company's proprietary MEMS mass flow sensing technology featuring large dynamic range, high accuracy and long life time. The MEMS sensing elements are designed with a pressure balancer that allows the applications at high working pressures. 

The newly developed thermal time-of-flight sensing offers the unprecedented performances and enabled with multi-parameter sensing capability.

Typical applications include,

1. Medical devices or equipment, such as ventilator, anesthesia equipment, asthma detector, autospirometers, endoscope, gamma knife, CPAP, and many more

2. Process control and monitor, such as wielding process, gas mixers, food package robot control clogging sensing fan monitoring and many more

3. Instrumentation, such as GC spectrometers, gas control equipment, air samplers, leak detection, gas analyzer, and many more

4. Semiconductor equipment, such as die-attachment, wire bonder, wet chemical bench monitor

5. Smart home/HVAC, provides the monitoring of the ventilation in hoods and feedback for efficiency.

The MEMS mass flow meters are built on the flow sensors with advanced user interfaces, wireless data ready for IoT, sophisticated package and can also apply for a large flow channel metrology requirements. The company's technology also enables the meter to automatically recognize the pre-programmed flow media which is not available for other similar products on market. Typical applications include,

1. Medical oxygen metering and control, provides in particular for hospital oxygen delivery system

2. Process control, such as beverage production, manufacture gas process, and others

3. Natural gas or other fuel gas, such as control of the combustion efficiency

4. Coal bed gas initiator, provides the tracer for the initiation of the drilled coal bed to facilitate the efficiency of the production

5. Smart cylinder gas meters, are specially developed for facilitating the gas cylinder consumption, leakage, dispatch, inventory and manufacture. The incorporated IOT technology enables the system to be truly smart.

MEMS TOF SENSORS FOR MICROFLUIDIC METERING


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The MEMS time-of-flight (TOF) flow sensors are made with the company's proprietary MEMS flow sensing technology that is particularly for microfluidic metering applications. The products features a large dynamic range, high accuracy and long life time. The MEMS sensing elements are designed and packaged with a cost effective process that allows the disposable options for super high volume applications. Typical applications include,

1. Drug delivery, such as infusion pumps, anesthesia equipment, and many more

2. Physiological fluid monitor, such as digital urine bags and many more

3. Instrumentation, such as blood analyzer, IV analyzer, and many more

4. 3D printers, provides the control of liquid materials in-flow

5. Pharmaceutical process control, provides the monitoring of the trace liquid concentration process monitor.

MEMS PRESSURE SENSORS AND GAS SENSORS


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Siargo now offers integrated pressure sensor with dual pressure sensing elements and gas concentration sensors. With the advanced thermal parameter sensing technologies, Siargo is now offering gas concentration measurement for dual gas mixture. Our gas sensors are often integrated with the flow and pressure sensors in a compact package that offers value-added features for customers as a turn-key solution.

The dual pressure sensors utilize both piezo and thermal sensing technology in a compact package that is ideal for miniaturized device applications, such as portable CPAP applications.

MASS FLOW SENSORS AND METERS

For clean gas and liquid flow applications

FS -SERIES MASS FLOW SENSORS

For various applications

The series of products can be used in many applications in medical, process, flow control, instrumentation, etc. Please read additional info. for more packages and options.


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MF5100 MASS FLOW METERS

For in-line flow measurement and control

The meter can be used for general purpose in-line flow measurement and possible gas recognition with large dynamic range and high accuracy.


Datasheet 

MF5600 MASS FLOW METERS

For in-line flow measurement

For general purpose in-line flow measurement with detachable display and multiple user interfaces. Has been deployed in high volume for oxygen delivery.


Datasheet 

MF IN-LINE MASS FLOW METERS

Battery powered in-line flow meter

The battery powered in-line flow meters have been used for process monitor and metrology, especially where explosive gases such as natural gases are of interests.


Datasheet

DIGITAL MASS FLOW METER WITH MANUAL CONTROL

For process control

The MF4600 series are designed for replacement of volumetric manual controllers, it provides precise control of a process involving gas flow with remote data and safety.


Datasheet 

MASS FLOW METER FOR OEM

Compact design for instrumentation

MF 4000 series provide the local display with programmable capability for flow alarm, gas compatibility, and many other functions.


Datasheet 

SMART CYLINDER METER WITH IOT

For gas cylinder management

This product provides the precise gas consumption, leakage and other parameters for gas cylinders. The data can be relayed to a smart device and further to cloud computing.


Datasheet 

GENERAL PURPOSE MASS FLOW METER

A general purpose flow meter

MF5700 series are best for general purpose flow metering such as laboratory, instrumentation or other gas flow metering requirements. It offers wireless data and valve control. Fully enabled with IoT.


Datasheet

BATTERY POWER MASS FLOW WITH CONTROL

For process control

This MF5100V product series provide high precision control of mass flow while having the option of battery power which is ideal for mobile or lab applications.


Datasheet 

MASS FLOW METER WITH THERMAL TIME-OF-FLIGHT

Gas independent and precision

MF5900 is the first thermal time-of-flight sensing product that offers gas independent (limited gases) mass flow with super high precision.


Datasheet 

MASS FLOW WITH IOT

For gas process management

MF4700 series is capable of metering the precise gas consumption, and ready for wired or wireless data transmission for IoT.


Datasheet 

GENERAL PURPOSE MASS FLOW METER

A general purpose flow meter

The product series are designed for high pressure rating. It also offers various digital interfaces such as 4-20mA, and RS485 Modbus.


MICROFLUIDIC SENSORS, METERS AND DISPENSERS

For microfluidic applications

LF6000M FLOW METERS

For microfluidic flow metering

These products are designed for general purpose microfluidic metering applications. It opts a variety of interfaces including wireless data with APP.


Datasheet 

LF600 FLOW SENSORS

For microfluidic flow sensing applications

The design of the products is for OEM and other type of applications.


PRESSURE SENSORS

Differential and gauge sensing with thermal and piezo sensing

FSP1000
DIFFERENTIAL PRESSURE SENSOR


For low pressure applications

The products are designed for general purpose differential pressure measurement. In particular for HVAC and CPAP.


Datasheet 

FSP2000
DUAL PRESSURE SENSOR


With differential and gauge pressure sensing

The unique sensor is designed with both differential pressure and gauge pressure sensing in a compact package. Ideal for portable applications, as well as applications such as CPAP.

 


 

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