PMS (Powder Moving System)
Prevents powder coalescence by shooting out nitrogen gas
PMS can solve clogging issue when byproducts are formed during the semiconductor and FPD process by shooting out hot N2 into exhaust lines.
PMS can solve clogging issue when byproducts are formed during semiconductor,,LCD and OLED manufacturing process
*Reduce powder sedimentation of Fore line and Exhaust line
*Possible to shoot out hot N2 with proper pressure and targeted flowrate
*Suppressing oxide formation inside the pipe
*Reduction of maintenance costs and maximization of equipment efficiency.
*Applicable to pipes and equipment (PUMP, SCRUBBER) which located in narrow spaces
EPD (Exhaust Pressure Detector)
Real-time monitoring of exhaust pressure about the phenomenon of exhaust line clogging
EPD system can monitor clogging issues in pipe lines and predict PM. In addition, it can prevent and pre-sense physical losses, such as Gas leakages, Vacuum pump trip (occurrence of wafer accident and repair cost), etc.
*Real-time pressure sensing inside the Exhaust lines
* Solve clogging issue when byproducts are formed during the semiconductor and FPD process in exhaust lines.
*Alarm setting function
*Reduces powder sedimentation in Fore and Exhaust lines
*Possible to shoot out hot N2 with proper pressure and targeted flowrate.
* Suppressing oxide formation inside the pipe
* Reduction of maintenance costs and maximization of equipment efficiency.
* Applicable to pipes and equipment (PUMP, SCRUBBER) which are located in narrow space
Flexible Heating Pipe
Simplified and optimized complex exhaust lines with interlock designed triple piping structure.
Induces regular fluid flow by heating the pipe itself and prevents sedimentation of corrosive oxides by focusing thermal energy into the pipe
Heating Jacket
Minimize impurities being piled by maintaining the target temperature of all exhaust lines with special fiber material
Without installing any additional devices, solve the problem of getting compressive impurities in Chamber,
Fore Line, Exhaust Line during the process of semiconductor by heating the vacuum line with H/J.
*Customizable in various ways based on soft fabric materials
*Complex modification is possible, and outstanding osculation on pipe surface
*Prevents overheating by double inter-lock structure (First: Bimetal/ Secondary: Fuse)
*Minimize atmospheric heat loss by applying materials of outstanding thermal retaining effect (tolerance of surface temperature maintenance: ±5℃)
*Failure detection system applied
*Detachable form that allows easier maintenance
*Excellent osculation-capability based on high-flexibility
*With management by jacket, easier managing history of delivery, maintenance and repair
