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Automated Testing Solution E-LIT(EMMI Thermal imaging microscope) E-LIT – Automated testing solution system allows non-contact failure inspection of semiconductor material during the manufacturing process. Inhomogeneous temperature distribution, local power loss can be measured with Lock-in Thermography. This is achieved by using the shortest measurement times combined with a high-performance thermographic camera and a specialised lock-in procedure. The power supply for this process is clocked with a synchronisation module and failures that produce mK or even μK differences are reliably detected. Smallest defects like point and line shunts, oxide failures, transistor and diode failures on a PCB surface and in IC´s can be detected and displayed in x and y positions. Additionally, it is possible to analyse stacked-die packages or multi-chip modules in z-direction with merely changing the lock-in frequency.

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