Scientists from the world-class scientific center "Advanced Digital Technologies" at Peter the Great St. Petersburg Polytechnic University have developed a technological complex capable of creating nanostructures for microelectronic equipment. The complex consists of two parts: the industrial prototype of a maskless nanolithography installation and an industrial prototype of a plasma-chemical etching installation for silicon.
The first part of the complex, the maskless nanolithography installation, allows the creation of an image on a substrate without using a template or mask. This alternative method significantly reduces both the time and financial costs associated with lithography.
According to the scientists, the domestic installation costs approximately 5 million rubles, in contrast to the 10-13 billion rubles required for foreign equipment. Additionally, the scientists have developed specialized software to operate the device, which is fully automated. They are also working on implementing a feedback system to minimize human errors during operation.
The second part of the complex involves plasma-chemical etching, which follows the pattern created in the first step. This process not only creates nanostructures but also enables the production of silicon membranes for ship gauge pressure sensors. The membranes created through plasma-chemical etching are more reliable and sensitive compared to those produced using liquid or laser etching methods.
The head of the scientific group and the laboratory "Technology of Materials and Electronic Products" at St. Petersburg Polytechnic University, Artem Osipov, emphasized that these membranes are entirely domestically produced.
The combination of maskless nanolithography and plasma-chemical etching offers a wide range of benefits. For instance, in radar equipment, it can increase the lifespan of devices by more than 20 times. Moreover, applying this technology in solar panel production reduces their weight and dimensions, allowing them to operate efficiently even in cloudy weather. Osipov noted that machine learning will be integrated into both installations, and further research will be conducted in the field of power electronics.
