Process control is the key to taking your production beyond ordinary and achieving new levels of performance. To control any process, you must first measure it precisely.

This is what makes Brooks Instrument the global leader in precision fluid measurement and control technology. We enable precision process performance. We deliver results that consistently create a competitive advantage for our customers. In heavy industry. In oil and gas refining. Chemical and petrochemical research. Pharmaceutical and biopharmaceutical production. Solar cell, LED, thin film, fiber optic and semiconductor manufacturing. And beyond. 

Proven performance
Brooks Instrument is a trusted partner because our flow, pressure and vaporization instrumentation is more than accurate. It is reliable. Stable. Repeatable. Durable. It’s proven year after year, decade after decade, in the most demanding industrial and electronic manufacturing systems. It continuously incorporates innovations that move measurement and control technology to new levels of flexibility and precision.

World’s largest installed base of mass flow controllers; one of the most trusted suppliers of mass flow technology to the global semiconductor industry.
Brooks holds over 150 active patents, so our product portfolio incorporates multiple patented advances in fundamental fluid measurement and control technology.
Innovative companies such as UNIT Instruments, Tylan, and Celerity, pioneers in developing MFC technology as well as pressure measurement and control technology, are now part of the broad family of Brooks products.
Many Brooks products are available with national laboratory-calibration traceability and certification, recognized hazardous area approvals, pressure boundary certifications, material certifications and more.
Focused expertise
The performance of our devices is fully matched by our technical and application expertise. Our instrumentation engineers and application specialists focus on solving real-world process challenges. They can help you select and configure the optimum combination of flow, pressure and vacuum devices that raise the performance and results (yield, throughput, etc.) of your systems and processes to new levels.

We then support those products through their operational lifetime through a growing global network of factory-certified service and calibration centers, ready to care for your Brooks devices and keep your uptime levels as high as possible.

Semiconductor Products
Absolute precision and control. For the world’s most demanding industry.
Precise and repeatable process control: It is the fundamental driving factor when manufacturing electronics and semiconductor products. As each successive generation of tools, processes and nodes have been developed and deployed, the extreme, ultra-high performance requirements and demand for constant innovation and improvements in semiconductor flow and pressure instrumentation has – and continues to be – non-stop.

Brooks Instrument semiconductor products deliver on those requirements, with the industry’s most advanced flow, pressure, vacuum and vapor delivery solutions. Our portfolio of semiconductor products is built on our decades of experience creating many of the groundbreaking measurement and control devices that are now standard components of process tools at every level of the industry.

And when you choose Brooks Instrument semiconductor products, you also choose the unique insight and resources that only we bring to solving fundamental FEOL and BEOL process and yield challenges: 

Expertise: Leading semiconductor tool builders look to Brooks’ people for their proven expertise and insight into refining our flow and pressure measurement and control technology to match unique process gas, chamber matching and throughput challenges.
Precision: Brooks offers customers the most appropriate, application-specific level of accuracy, durability, and most importantly, repeatability in the semiconductor products we offer to help manage skyrocketing tool costs. We constantly invest to improve our portfolio, so each device contributes to improved process control, which ultimately translates into productivity and yield.
Reliability: Brooks’ semiconductor products are engineered with the highest quality steels and alloys, high-performance digital electronics and patented sensor designs to deliver decades of accurate, repeatable measurement and control, especially when interacting with exotic process gases.
Focus: Brooks has a unique focus on flow and pressure measurement and control, with a growing service capability and global footprint to enable faster response to instrument issues and better life cycle support for the semiconductor products we offer.
Support: We are supportive, providing applications expertise, custom metering configurations, service and assistance in selecting semiconductor products.
High & Ultra-High Purity Gas Mass Flow Controllers & Meters

Pressure & Vacuum Products

Liquid & Vapor Products



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