Harsh Duty Process Application
SDE Series
The Durable, Long Lasting Dry Vacuum Pump for any Process Application.

Light Process
MU-X & MU-P/H Series
The Industry's Smallest Pump with the lowest power consumption. On Board Pump, Ideal for Installing in any Tools.

Pumping Performance
SDE & SDL Series
Large Pumping Capability for Increased Wafer and FPD Substrate Sizes. SDE Series for Harsh Duty Application & SDL series for Lock application.

General Industry
NeoDry Series
Air Cooled Vacuum Pump for Low Cost of Ownership, Long Life & Maintenance Cycle. Fit right in for Industrial Application such as Analytical, R&D Laboratory Equipment.



Recommended Companies