Fast, High Sensitivity Mass Spectrometers for in-situ Metrology

The ASTON platform includes a portfolio of fast, high-sensitivity mass spectrometers with proprietary software that enable quantitative, rapid gas analysis required in complex in-situ semiconductor manufacturing processes. The ASTON platform delivers real-time, chemically specific actionable insights to maximize throughput and yield. One tool can replace multiple legacy tools.

Best-in-Class Features

Parts per billion (PPB) sensitivity

Fast sample rate with High Sensitivity



Long sensor lifetime

Broad mass range
ASTON Advantages

Ideal for ALD/ALE and Safety

Resistant to corrosive gases and condensates

Real-time data, actionable insights

Cloud connected

No plasma required


Recommended Companies