Fast, High Sensitivity Mass Spectrometers for in-situ Metrology
The ASTON platform includes a portfolio of fast, high-sensitivity mass spectrometers with proprietary software that enable quantitative, rapid gas analysis required in complex in-situ semiconductor manufacturing processes. The ASTON platform delivers real-time, chemically specific actionable insights to maximize throughput and yield. One tool can replace multiple legacy tools.
Best-in-Class Features
Parts per billion (PPB) sensitivity
Fast sample rate with High Sensitivity
Stability
Repeatability
Long sensor lifetime
Broad mass range
ASTON Advantages
Ideal for ALD/ALE and Safety
Resistant to corrosive gases and condensates
Real-time data, actionable insights
Cloud connected
No plasma required
