Various types of cleaning technology including physical and chemical methods
Cleaning know-how for all materials including metal, quartz, Si, Sic, etc.
Specialized cleaning technology for the interior part of the product hole
Quantitative test of particle through CPDS, HIS, and LPC
Benefit
Ultra-High Purity Parts Validation
Defect rate reduction with removing particles below 0.1μm size
Reduction of organic/inorganic particles
Extending part's lifetime with our patent cleaning technologies and inspection techniques for showerheads and other parts
Application
LAM, TEL, AMAT, ULVAC, SEMES etc. CVD, Metal Facility
