Various types of cleaning technology including physical and chemical methods
Cleaning know-how for all materials including metal, quartz, Si, Sic, etc.​
Specialized cleaning technology for the interior part of the product hole
Quantitative test of particle through CPDS, HIS, and LPC
Ultra-High Purity Parts Validation​
Defect rate reduction with removing particles below 0.1μm size
Reduction of organic/inorganic particles
Extending part's lifetime with our patent cleaning technologies and inspection techniques for showerheads and other parts
LAM, TEL, AMAT, ULVAC, SEMES etc. CVD, Metal Facility


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