All-Purpose Nanoscale
X-Ray Inspection System
MUX-2021

Fully Automated Wafer Level
X-Ray Inspection System
TUX-8000

All-Purpose Nanoscale
X-Ray Inspection System
TUX-3300N

Optional Equipment for Nanoscale X-Ray Inspection System (Heating Equipment)

Semiconductor Manufacturing Equipment
Semiconductor Manufacturing Equipment

Dry Etch Systems
・Conductor Etch Systems
・Production Support Program
・Photomask Repair System
CD-SEM & Defect Inspection
・CD-SEM
・Design Based Metrology System
・Defect Review SEM
・Wafer Surface Inspection System
・Dark Field Wafer Defect Inspection System
・Field Solution
・Electron Microscopes / Atomic Force Microscopes
Service & Support
Service & Support
Semiconductor Room
"Semiconductor Room" provides commentaries on the technology and equipment for semiconductor wafer manufacturing process.

What are semiconductors?
Semiconductor manufacturing
Glossary
Index by Device:
Hitachi High-Tech
Index by device for the customer of Semiconductor Manufacturing Equipment (etch systems, metrology equipment(CD-SEM) and defect inspection equipment).

LSI
MEMS
Other (hard disks and flat panel displays)
Power devices & SAW filters
CMOS image sensors
 

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