Founded in 1971, Mass-Vac, Inc. serves New England-based customers in need of vacuum pump support and service. Over the years we have expanded our original services to include new and used vacuum equipment, vacuum pump fluids and vacuum components. We have also developed a complete line of vacuum inlet traps and exhaust traps.
Located in Billerica, Massachusetts, Mass-Vac’s original New England clientele is now joined by customers throughout the U.S. and the world. As we continue to expand our reach and enhance the services we offer, our fundamental mission remains to provide our customers with the highest quality, most innovative support in the industry.
Mass-Vac is an active member of SEMI and the American Vacuum Society. Check our links in the Resources section of this site for more links to vacuum-related organizations and associations.
We’re your industry-standard source for new and used vacuum equipment, vacuum pump fluids, and vacuum components. We carry a complete line of vacuum inlet traps and exhaust traps. Our signature product line, the MV MULTI-TRAP® provides unparalleled protection for pumps and exhaust lines. Here you’ll find basic information on all our products and services as well as recommended applications, conversion tables (PDF File), and industry links.
High Capacity, High Efficiency, Vacuum Inlet Trap.
Removes corrosive and abrasive particles that can destroy your vacuum pump
Extends Pumping System Preventative Maintenance periods by up to 2 times or more.
Common Applications are; LPCVD, PECVD, METAL ETCH, MOCVD, ION IMPLANT, HVPE,
Foreline Trap Ensures positive flow with no “blow-by”
All stainless steel construction.
Straight-thru and right-angle styles offered.
Wide variety of filter elements to choose from.
Midi-Mist & Maxi-Mist
Stainless steel construction resists corrosion.
Protects environment from vacuum pump exhaust.
Drain plug for recovering pump fluids.
Simple disassembly and cleaning.
High-capacity coalescing filters drain oil into a large reservoir for easy recovery.
Designed for large capacity vacuum pumps
Protects your vacuum pump and pump fluid.
Reduces maintenance costs.
Prolongs pump and fluid life.
Removes acids, alkalis, moisture, particles and other corrosive or contaminating materials.
Vacuum Inlet trap with transparent Sump
Select inserts for trapping particles, water, oil, or corrosive chemicals.
Transparent sump shows when to change insert without removing from vacuum system.
A compact, portable, self-contained system for continuously filtering mechanical vacuum pump fluid.
Vacuum degassing chamber reduces pressure above the surface of the material to permit escape and subsequent removal of entrapped air and other gases that could induce failure of the final product.