BSGS (Bulk Specialty Gas System)
The system designed to provide specailty gas stored in the large volume gas container safely and without contamination. It is possible to massively supply gas for a long period time and it is good for operation cost reduction and gas purity control.
System Specifications
Supply Method : Automatic change type
Control Method : Full automatic system
Supply Container : Y-Cylinder, Tube trailer, Tank lorry
Supply Flow Rate : 300~3000 SLPM. (Max Flow Rate@ N2 Gas)
Supply Pressure : 0.1~0.9MPa
System Dimensions : 1500(w) x 570(d) x 1800(h) Without controller
System Weight : 350kg
Color : White Gray (EX4504(S)-SR-WH020)
System Features
Possible to operate automatically and maunally
Safety device by gas characteristics
Erroneous operation prevention interlock
Alarms and alarm history control
Possible to install in the explosion hazard area
Communication support for host monitoring
GAS CABINET
The system that supplies specialty gas in the small volume. With safety devices for gas leakage detection and programmed automatic operation, it detects gas leakage in the early stage and supplies gas safely by preventing the operator's mistakes.
System Specifications
Supply Method : Automatic change type
Control Method : Full automatic system
Supply Container : 49 Liter
Supply Flow Rate : 30 SLPM. (Max Flow Rate@ N2 Gas)
Supply Pressure : 0.1~0.9MPa
System Dimensions : 800(w) x 550(d) x 2200(h) Without controller
System Weight : 190kg
Color : White Gray (EX4504(S)-SR-WH020)
System Features
Easy to operate
Safety device by gas characteristics>
Erroneous operation prevention interlock
Alarms and alarm history control
Possible to install in the explosion hazard area
Communication support for host monitoring
VMB (Valve Manifold Box)
The VMB is the system that receives gas from the gas supply system, branches it through multiple paths and supplies it to the process system. If there are many process systems, it saves the investment cost of the gas supply system and it is easy to add and manage supply pipes. With pressure controllers and filters installed by branch pipes within the VMB, it supplies clean gas in the pressure required for each process.
System Specifications
Supply Method : Inlet 1~2 & Outlet 4~12
Control Method : Semi-automatic system
Supply Flow Rate : 1~100 SLPM
Supply Pressure : 0.1~0.9 Mpa
System Dimensions : 800(w) x 550(d) x 2200(h)
System Weight : 150~170kg
Color : White Gray (EX4504(S)-SR-WH020)
System Features
Easy to operate
Safety device by gas characteristics
Erroneous operation prevention interlock
Alarms and alarm history control
Possible to install in the explosion hazard area
Communication support for host monitoring
GAS MIXER SYSTEM
The Mixer system is full automatic mixing system combines concentraion anaylizer and MFC to provides accurate mixing ratio. It supplies gas mixed safely and reliably to process devices in real-time.
System Specifications
Supply Specification : Possible to mixing gas in ±0.1% concentration accuracy
Control Method : Full automatic system
Supply Container : 80~200 liter tank
Supply Flow Rate : 50~100 SLPM. (Max Flow Rate@ N2 Gas)
Supply Pressure : 0.31 Mpa
System Features
Easy to operate
Safety device by gas characteristics
Erroneous operation prevention interlock
Alarms and alarm history control
Possible to install in the explosion hazard area
Communication support for host monitoring
CCSS (Central Chemical Supply System)
The system that safely supplies the high purity chemical required for the semiconductor, LCD and solar panel production prosesses in the flow rate required for the plant system. It fills the chemical from the tank lorry or the drum container to the storage tank and It supplies to process equipment through pump or N2 compression.
System Specifications
Supply Method : Pumping or N2 compression
Control Method : Full automatic system
Supply Flow Rate : 1~100 LPM
Supply Pressure : 0.3~0.5 MPa
System Dimensions : 1600(w) x 2000(d) x 2200(h)
System Weight : 700~1500kg
Chemicals : Inorganic (HCL, HF, TMAH, KO … etc) / Organic (NMP, IPA, THINNER … etc)
System Features
Possible to operate automatically and maunally
Safety device by chemical characteristics
Erroneous operation prevention interlock
Alarms and alarm history control
Communication support for host monitoring
CDS(Chemical Dilution System)
The system that dilutes the high concentration chemical to low concentration required for the semiconductor and display production processes. In general, combined with DI, it is possible to produce the chemical in new concentration required for the process. Since it is possible for the user to produce the chemical in the desired concentration, it saves the chemical procurement cost.
System Specifications
Supply Method : Pumping or N2 compression
Control Method : Full automatic system
Supply Flow Rate : 1~100 LPM
Supply Pressure : 0.3~0.5 MPa
System Dimensions : 3500(w) x 2000(d) x 2200(h)
System Weight : 1500~2500kg
Mixing Tank : 0.5~4 ㎥
Chemicals : TMAH, KOH, HF, NH4OH … etc
System Features
Possible to operate automatically and maunally
Safety device by chemical characteristics
Erroneous operation prevention interlock
Alarms and alarm history control
Communication support for host monitoring
