SGL Carbon‘s business unit Graphite Solutions (GS) is a one of the world’s leading experts in specialty graphite for a wide spectrum of industries, which includes high-purity graphite components crucial to processes in the semiconductor, LED and solar industry. The GS offering ranges from graphite consumables for crystal growing hot zones (heaters, crucible susceptors, insulation), to high-precision graphite components for wafer processing equipment, such as silicon carbide coated graphite susceptors for Epitaxy or MOCVD.
Graphite in the Production of Semiconductors
No modern life without semiconductors: Computers, power supplies, LEDs, Internet, solar cells – they all only work with semiconductors (e.g. silicon). Components made of specialty graphite are indispensable for many processes in semiconductor production.
This applies to the crystal growing or the subsequent finishing with epitaxy or ion implantation. These processes take place at very high temperatures and in extremely corrosive environments. At the same time, highest purity and absolute precision are required. We deliver graphite-based solutions along the entire semiconductor production route and are one of the leading suppliers to the semiconductor industry with our silicon carbide coating.
Compound Semiconductor and LED
Applications
Materials
High-purity graphite components are crucial to processes in the semiconductor, LED and solar industry. Our offering ranges from graphite consumables for crystal growing hot zones (heaters, crucible susceptors, insulation), to high-precision graphite components for wafer processing equipment, such as silicon carbide coated graphite susceptors for Epitaxy or MOCVD.
Applications
SIGRATHERM Rigid Felt cylinder
Semiconductor Crystal Growth
SIGRAFINE electrodes (polychucks) for Siemens
Polysilicon Production
SIGARTHERM Soft Felt and Rigid Felts
High Temperature Furnaces
DIABON Tube Sheet for Shell and Tube Heat Exchanger
Process Technology for Corrosive Applications
Silicon and SiC Epitaxy
Compound Semiconductors and LED - Graphite for Highest Purity and Precision
Light-emitting diodes illuminate our everyday life in all colors, and are also efficient and energy saving. The light of a LED is generated in semiconductor connections. Their performance depends crucially on the quality of these semiconductors.
This is where our specialty graphite comes into play: isostatic graphite is fundamental for the production of compound semiconductor layers.These are generated in the “hot zone“ under extreme temperatures during the so-called epitaxy, or MOCVD process. The rotating carrier on which the wafers are coated in the reactor, consists of silicon carbide-coated isostatic graphite. Only this very pure, homogeneous graphite meets the high requirements in the coating process.
Semiconductor
Applications
Materials
High-purity graphite components are crucial to processes in the semiconductor, LED and solar industry. Our offering ranges from graphite consumables for crystal growing hot zones (heaters, crucible susceptors, insulation), to high-precision graphite components for wafer processing equipment, such as silicon carbide coated graphite susceptors for Epitaxy or MOCVD.
Applications
The Graphite Materials & Systems (GMS) business unit at SGL Carbon is the global leader in specialty graphite solutions.
LED Chip Production
SIGARTHERM Soft Felt and Rigid Felts
High Temperature Furnaces
St. Marys illuminates the world
Many manufacturers of LED and semiconductors rely on system components from St. Marys for their manufacturing processes - namely in the form of SGL Carbon graphite-based carriers coated with silicon carbide (SiC), known as wafer carriers.
The lineage of SGL Carbon’s St. Marys facility dates back to 1899, carrying digitization from St. Marys out into the world.
More
Materials
SIGRABOND Heat Shield
SIGRABOND Carbon Fiber-Reinforced Carbon
SIGRAFINE Extruded Graphite
SIGRAFINE® Extruded and Vibration Molded Graphite
SIGRAFINE isostatic graphite
SIGRAFINE® Isostatic Graphite
SIGRAFINE<sup>®</sup> SiC Coating
SIGRAFINE® SiC Coating
Picture of SIGRAFLEX high-purity flexible graphite foil and sheets
SIGRAFLEX® High-Purity Flexible Graphite Foil and Sheets
SIGRAFLEX unreinforced and reinforced graphite sheets
SIGRAFLEX® Unreinforced and Reinforced Graphite Gasket Sheets made from Flexible Graphite
SIGRASIC combines a high hardness with a good fracture toughness.
SIGRASIC®
SIGRASIC Carbon Fiber Reinforced Silicon Carbide
SIGRASIC® Carbon Fiber Reinforced Silicon Carbide
SIGRATHERM Rigid Felt
SIGRATHERM® Rigid Felt
SIGARTHERM Soft Felt and Rigid Felts
SIGRATHERM® Soft Felt
