Kinetic Systems, Inc.

CHEMICAL PROCESS SYSTEMS

SURFACE PREP
Our portfolio of wet processing systems ranges from manual to full multi-tasking automation, configured to meet your specific batch immersion, spray or single wafer application requirements.

PRODUCT PORTFOLIO

ECD (PLATING)
Kinetics specializes in pattern and alloy plating with hundreds of systems installed in leading R&D, pilot line and HVM facilities with standard and customized options available.

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OEM MODULES
Kinetics supports OEM equipment manufacturers by providing sub-assembly systems, that add or enhance functionality to larger processing equipment platforms.

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CUSTOM PROCESS TOOLS
Partner with Kinetics’ skilled and experienced design team for custom, application-specific fluid handling and processing equipment worldwide.

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SOLAR CELL PROCESSING
Kinetics offers various solutions to address the requirements of photovoltaic companies for high-speed chemical processing tools at very competitive pricing.

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REFURBISHED EQUIPMENT
In addition to our own tools, Kinetics has extensive experience in refurbished process equipment: All with the capacity to improve system flow, yields, and operator control.

PROCESS MEDIA DISTRIBUTION SYSTEMS
CHEMICAL DELIVERY

Kinetics’ truly modular chemical delivery meets the widest array of process applications. Because modules are configurable, they fit new installation, replacement, and upgrade requirements.

By balancing advanced technology with proven performance, Kinetics provides a reliable approach to engineering, installation, operation, and maintenance. This broad and deep expertise ensures that every module contributes to overall process success.

Kinetics combines powerful, productive dispense technology with ergonomic maintenance features and a full range of flow/pressure capabilities to deliver chemical dispense tools tailored to individual needs across a broad spectrum of applications.

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CHEMICAL BLEND
kineticscb200
Kinetics’ chemical blending and dilution system options built for both blending accuracy and capacity meet a variety of demanding fab process and productivity requirements.

Every system leverages proven, weight-based chemical-blending technology to achieve the highest blend accuracy levels possible. Optional flow-rate based blending modules are available for chemical blends requiring high make-up rates and lower accuracy levels.

A range of blend tank and day tank sizes provides optimal options for configuring systems to meet specific capacity and utilization requirements. Chemical metrology instruments are subsequently matched to specific process requirements to meet chemical blending standards over extended periods.

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SLURRY DELIVERY
SB100
Consistent with other process media distribution systems from Kinetics, slurry delivery systems are critical to the success of leading microelectronics companies worldwide. At the core is the ability to meet requirements with a sense of urgency while continuing to hold standards.

Kinetics supports the most demanding CMP planarization processes being performed today through considered design and agile manufacturing. The key is planning for anticipated irregularities like materials variances, operating conditions, and personnel supervising the process.

Kinetics’ extensive experience in both designing and delivering high precision slurry systems is well documented. Whether delivering pre-mixed slurry materials or blending and dispensing extremely challenging slurry mixtures, Kinetics is prepared to respond. This includes highly critical oxide, tungsten, polysilicon, STI, and copper CMP slurry processes.

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GAS DISTRIBUTION

Kinetics gas distribution systems are deployed in microelectronic and solar manufacturing facilities worldwide. A wide range of panels, cabinets, and controllers are ready to be configured according to specific process gas and fab operational requirements. Systems can be engineering for manual, semi-automatic, or fully automatic operation.

Standardized, high-volume gas distribution systems are also available for 200- and 300-mm wafer fabrication, as well as thin-film and silicon-based photovoltaic manufacturing. Kinetics tools are well documented to ensure that quality and consistency are intrinsic to every system.

Kinetics designs and manufactures gas purification and liquid-gas dispense systems under strict quality guidelines to meet custom manufacturing. All of Kinetics gas systems achieve uptimes exceeding 99.999%.

FACILITY SUPPORT EQUIPMENT
UNIQUE WAFER PROCESS STEPS
With over eleven different metals involved, and 300 wafer process steps that must be performed in an ultra-clean environment, to say that semiconductor devices manufacturing has some unique challenges would be an understatement. As manufacturers continue to push to finer technology nodes, meeting today’s tight requirements requires the expertise that only comes with decades of experience.

Kinetics Solutions Group’s extensive line of specialty products and facility support equipment has supported the unique needs of wafer process steps for over 40 years. From the world’s first recirculating cleaning tank for silicon wafers, to a complete turnkey wet process systems and support equipment for diverse applications, Kinetics Solution Group’s products stand the test of time.

The magic happens in a 28,000 sq. foot facility in Livermore, CA, where numerous fabrication tools and support facilities required for specialized manufacturing are put through their paces daily, serving the global manufacturing industry.

QUARTZ TANKS
MEGATHERM™ High Temperature Quartz Baths were developed to stand up to the rigors of resist stripping, RCA cleans, and silicon nitride etch. The product line was designed especially for a low contamination and particle-free environment.

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RECIRCULATING BATHS
The Center Feed™ was the semiconductor industry’s first recirculating and filtered bath, and is the basis for the Chemkleen™ bath, today’s gold standard. Primarily used for HF, BOE, and KOH applications, Chemkleen features a four-sided weir basket, customized filter chamber, heat exchange coils, and a compact immersion pump.

IMMERSION PUMPS
Kinetics designed its immersion pumps exclusively to meet the rigorous requirements of the semiconductor industry for recirculating filtered etch modules. Manufactured to be contamination-free and provide trouble free and efficient operation, pumps can be adapted for portable or stationary applications.

TEMPERATURE CONTROLLED CIRCULATORS
Kinetics manufactures a complete line of circulators for precision temperature control and low maintenance. WHRV and WHO are specifically designed for the semiconductor industry and used to control temperature in filtered etch modules and other chemical tanks where temperature stability and uniformity are vital.

QUICK DUMP RINSER
The MICROKLEEN™ Quick Dump Rinsers are designed with top adjustable spray rails, external bottom fill rails, and a larger dump door. These features allow the dump rinsers to fill faster, dump in a matter of seconds, and use less water.

PUMP STATIONS
Kinetics Chemblast™ series of pump stations are designed for situations where there is no AWN available, or the process tool is located away from the AWN. The pump stations collect spent chemistry from a dedicated tool, then pump it to the AWN or to a collection point.

DESICCATOR CABINETS
Whenever humidity-sensitive devices need environmental protection, Kinetics’ product line of desiccator shelves and storage cabinets are indispensable.

GLOVE BOXES
The goal of the lab glove box is to isolate and separate the operator from the devices within the controlled environment of the glove box. Glove boxes and other containment chambers are available in custom designs for every application and budget.

QUARTZ CLEANING SYSTEMS
Kinetics offers special quartz tube cleaning systems for thorough internal and external tube surface cleaning of diffusion tubes and similar quartzware.

BOTTLE WASH STATIONS
The Kinetics standard bottle wash station was designed to clean and hold up to 8 one-gallon bottles. It consists of two independent horizontal bottom spray rails with 4 vertical spray towers that assist in sliding the bottles.

BOTTLE CARTS
Bottle Carts are indispensable in active work areas where a handy and safe means for transporting bottled chemicals is required. Kinetics’ Bottle Carts are available in a variety of configurations.

WORK TABLES
Kinetics also offers competitively priced custom configured steel worktables.

PRODUCT PORTFOLIO

CHEMICAL CARTS
The Chemtran™ series of mobile chemical carts safely transports fresh or spent chemistry between the fab and waste dump sites. Safety features include 110% secondary containment, pneumatic pumps, chemical-fill-level sight tubes and over-fill shut-off features that provide a safe and handy alternative to more costly chemical transport techniques.

PROCESS CONTROL THROUGH MEASUREMENT
Chemical metrology is the science of measuring precise amounts of components that make up a mixture. In the semiconductor industry, chemical metrology is critical for developing and maintaining consistent recipes for successful manufacturing processes.

For example, chemical mechanical planarization (CMP) processes use slurries of varying consistency and particle size. Chemical metrology systems are integrated into the manufacturing process flow as part of the CMP steps to enable in-line monitoring that to maintain proper concentrations of a slurry’s composition.

Kinetics’ family of inline chemical metrology tools are designed to support CMP processes in different ways, from monitoring and replenishing mixture components, to particle size and distribution analysis, to real-time concentration measurement. Together, this suite of products maintains the integrity of chemical formulations throughout the CMP process.

MEGA SA100™
The Mega SA100 Automatic Titration and Replenishment System (ATRS) controls the percentage of a specific substance found in a mixture. For example, the system is often programmed to control the percentage of H2O2 found in slurry. This substance slowly decreases in the mixture over time and must be strictly monitored and replenished as necessary.

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MEGA SA200™
The SA200 Series Particle Analysis system (PMS 5200 and PCMB inclusive) provides stationary or portable particle size and/or distribution analysis. Systems include dilution control and flush mechanisms to maintain uptime and accuracy. Flush features can support either DI or chemical flush media. Configurations may contain a single or dual laser sensor. Stationary systems can be configured to provide output to dedicated PC or to the integrated IPC in an SBD tool.

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MEGA SA300™
Using infrared, refractometry, and ultrasonic techniques, the SA300 PCMB performs chemical concentration measurement in real time. These techniques are non-sample destructive, so the devices can be placed on the primary process lines of the supply, or when present return circuits of chemical process tools without harming the health or chemical character of the fluid. These in-line chemical concentration systems can also be applied on slipstreams to allow for additional economy of use through the service of multiple analysis points with a single analyzer.

MANAGING TOOL DATA IN REAL TIME
Access to real-time, actionable data is a key element in smart manufacturing. That is why supervisory control and data acquisition (SCADA) systems, comprising both hardware and software components, are the nucleus of today’s smart factories.

SCADA systems are used for the supervision and control of manufacturing facilities. They also are used to collect, process, and analyze data in real time. They rely on a human machine interface (HMI) to interact with field devices such as pumps, valves, motors, and sensors.

Remote terminal units (RTUs) and programmable logic controllers (PLCs) are microprocessors that communicate with HMIs and field devices, and route data to SCADA computers for analysis and action. Communication can be hard wired or remote using virtual network computing (VNC).

Kinetics offers a full suite of SCADA and controls solutions designed to work in concert with the Mega Fluids Systems product line.

PLC CONTROLS
Mega Fluid Systems offers PLC- or PAC-based control systems for the control and automation of both Chemical and Slurry Blend and Distribution systems. Choosing the control system that makes sense for the individual tool, we utilize rack and/or distributed input/output (I/O), and internal and external networking and communications to control and monitor the tool’s key devices — pumps, valves, tanks, metrology (pH, saturated gas units, concentration, particle size, titration, and temperature).

Built using same software tool as system HMI
Remote option using VNC
Web-client option
Paging/e-mail options
Increased functionality and flexibility

MEGAVIEW™
Mega Fluid Systems Controls Engineering Group supplies turn-key control, monitoring, and automation solutions for molecular delivery tools. Our team of controls and electrical engineers have extensive experience in the following applications:

Automating chemical and slurry blending and distribution systems
Designing intuitive HMI and SCADA applications
Providing plug-and-play network connectivity solutions, and
Providing alarm, graphing & charting, and reporting services.
Utilizing state-of-the-art visualization software, our team creates graphical user interfaces that show the user the information they need, when they need it — information, which when the application requires it, is always clear and intuitive. System overviews, drilldowns to P&ID-based details, set point and recipe control, alarm monitoring and acknowledgment, and special custom features implemented after extensive collaboration with the system users are all part of the Mega Fluid Systems HMI experience.

MEGALINK 2
The MegaLink 2 is a system that provides interfacing for status and demand handshake signals between chemical dispense units (CDUs) and multiple point-of-use (POU) tools. The system provides status and valve control interfacing between Mega dispense tools and valve manifold boxes (VMBs), which feed the POU process equipment by using advanced Ethernet communication. The system is designed to take control and automate factory chemical delivery, and can support up to 8 remote units per host.

In the highly configurable MegaLink 2, chemicals or slurry run from the CDU through the VMB and return to the CDU through a global loop. A signal is sent to the host when chemicals or slurry are available in the CDU. When the POU is ready for chemicals or slurry, it sends a demand signal to the host. If no alarm is present, a signal is sent to the VMB to open a single-stick automatic valve allowing chemicals or slurry to flow to the POU inlet.

Standards and Features:

Fully configurable I/Os, such as safety interlocks and valves
Can control VMBs from multisource delivery solutions
Hardware or software handshake signals interface
Touch-screen monitor included with host
Host controls up to 8 remote units
Multiple I/O configuration sizes to fit large- or small-scale factories
Supports up to 128 different global loops and associated CDUs & POUs
Supports up to 128 VMBs with a maximum of 12 fully configurable sticks, or 128 manually controlled TVBs
Redundant DC power
Supports up to 32 CSS points
Options:

Redundant Communications
Redundant AC Power Supply
Redundant PLCs