Large Glass Substrate Exposure Equipment "RZ"
"RZ" is the exposure equipment that forms the core of the color filter (CF) process that is important in the FPD (Flat Panel Display) production. It has the world's top market share as a proximity type exposure equipment compatible with large screen FPDs.
Roll to Roll Exposure Equipment "DZ"
"DZ" is the contact exposure equipment optimized for exposures such as deposition masks for OLEDs. It supports exposure by vertical conveyance and horizontal conveyance, and there is also a single-wafer type model. We respond finely to your needs with our equipment.
Photo Alignment Film Exposure Equipment "AEGIS"
The alignment film is a functional polymer film that aligns liquid crystal molecules in the display unidirectional. "AEGIS" forms an alignment film in a non-contact manner using a special ultraviolet light and a photomask. It corresponds to the glass substrate of G10.5 size
Automatic Optical Inspection Equipment "Capricorn"
"Capricorn" is the automatic optical inspection equipment for FPD manufacturing processes. Defect information (position, presence, shape, and OK or NG) is instantly output from image information captured by a specialized line CCD camera.
Repair Equipment
Color Filer Repair Equipment "Jupiter"
"Jupiter" corrects defects that occur on CF substrates and repairs the various defects such as protruding defects and chipping of pixels and wiring patterns at the time of the film formation.
TFT Repair Equipment "Taurus"
"Taurus" supports open defect repair of metal wiring with its own laser CVD and ink dispenser and high-precision, low-damage correction is also possible with high-performance lasers.
Precise Coordinate Measurement Equipment "Mercury"/"Venus"
Total Pitch Measurement Equipment "Mercury"
"Mercury" is the total pitch measurement equipment that measures various substrates up to 3m x 3.4m with submicron accuracy.
Critical Dimension Measurement Equipment "Venus"
"Venus" is the critical dimension measurement equipment that is specialized for measuring the dimensions of micro-pixel patterns of about several μm and required when manufacturing high-resolution OLEDs for such as smartphones
Overview
We offer top-of-the-line opto-mechatronics products and deliver a range of equipment to meet your manufacturing and inspection needs for photomasks.
Visual Inspection Equipment "Gemini"
“Gemini” provides high-speed and high-accuracy appearance inspection that meets the requirements of 8K displays and photomasks for small and medium-sized organic EL displays with V-Technology's proprietary mechatronics and a unique image processing engine equipped with various inspection logic.
Defect Correction Equipment "Sculptor"
“Sculptor” is a defect correction equipment specialized for defect correction of photomasks for FPDs. Correction of open defects (pattern missing or falling out) is possible by gas window laser CVD. Besides, it is equipped with a laser-optimized for short defect correction, enabling high-quality defect correction. It also supports defect correction for photomasks with halftone patterns.
Coordinate Position Measurement Equipment "Mercury SHR"
"Mercury SHR" is a coordinate position measurement equipment for photomask that achieves the world's highest class of measurement accuracy.
We have achieved the world's highest level of measurement accuracy with our proprietary opto-mechatronics technology.
Also, with original measurement software and a reference mask, error factors are completely corrected to construct an ideal grid coordinate system, achieving excellent measurement accuracy and repeatability.
Maintenance Service
Requirements for equipment are increasing day by day with the evolution of flat panel display (FPD) technology and changes in the business environment.
Our engineers who are familiar with our old and new equipment respond smoothly to different kinds of requests such as various modifications for advanced FPDs, and equipment relocation to rearrange production processes, over and above the maintenance, inspection, and troubleshooting services.
We have also established a supply system of genuine parts to support the stable operation of equipment operated in the world.
High-Tech Staffing Service
We have established "V-Technology Shanghai Human Resource Management Co., Ltd." (VSHC)in Shanghai, and we are developing an experienced engineer dispatching business utilizing the unique network we have cultivated in the FPD industry.
Our experienced engineers at VSHC specialize in mechanical engineering and electrical engineering. Many of them can speak Japanese, English,
Korean aside from Chinese. We confidently dispatch an engineer who can be an immediate force to meet the diverse needs of customers.
Salvage Service
Improving the yield of small and medium OLED is a common issue in the industry. We will launch the "Salvage service" starting from 2019 which fixes the mura panel defectives and improves the yield of module processes in a short period, and this does not require customers to invest in equipment.
This service can be used as a short-term, pay-per-use service whenever customers need it, and it does not require funds for equipment or time for inspection line setup. It is expected to be a highly convenient service that can exert when its yield deteriorates suddenly
We have been continuing various challenges to start up a business similar to the FPD equipment business and realize business diversification, one of our projects is the parts and materials business that are essential for manufacturing devices such as FPDs.
As the first phase in the parts business, we are currently working on the launch of the deposition mask business for OLEDs.
Deposition Mask Business
The deposition mask is a mask that forms an organic material on a TFT substrate and is one of the essential components for OLED manufacturing. Therefore, the market for the deposition mask for OLEDs is expected to grow in the medium to long term.
We have been conducting research and development for our proprietary deposition mask (Fine Hybrid Mask, FHM) since 2012, and then we have established VET in Yonezawa city, Yamagata prefecture for the manufacture and development of FHM in December 2017. Our group has made a capital investment of approximately JPY 5 billion and is planning to start mass production in 2019 with the support of Yamagata Prefecture and Yonezawa city.
About FHM(Fine Hybrid Mask)
Fine Hybrid Mask is the next generation deposition mask suitable for OLED manufacturing, achieving lightness and thinness while maintaining strength with the hybrid structure using metal and resin
