KEMSTREAM was founded in 2006 by a team of multi-disciplinary specialists with complementary competences. Our team has more than 30 years of cumulated experience in the development and manufacturing of direct liquid injection (DLI) vaporizers for Chemical Vapor Deposition (CVD) and Atomic Layer Deposition (ALD) tools and processes. KEMSTREAM is the leading supplier in Europe of DLI vaporizers for demanding precursors and applications. The range of products addresses research and development, pilot and production processes and applications. Our philosophy involves building up a long-term relationship with our customers and to provide them high quality tools, support and service excellence. The company is privately owned and based in Montpellier in the south of France.
KEMSTREAM manufactures innovative and advanced Direct Liquid Injection (DLI) vaporizers and atomizers for CVD, PECVD, iCVD, MOCVD, MOVPE, ALD, spray pyrolysis and all gas phase processes and precursors. They deliver pure, accurate, repeatable and stable vapors flows and aerosols flows. KEMSTREAM also manufactures accessories for DLI vaporizers and atomizers that are:
Liquid panels especially designed for feeding DLI vaporizers with air sensitive and/or moisture sensitive precursors, either pure precursors or precursors dissolved in an organic solvent
Temperature Control Units (TCU)
Gas panels for feeding DLI vaporizers with carrier gas
Our team of experts offers consulting services in:
CVD, ALD and Spray Pyrolysis precursors and processes
Flows Measurement and Control
KEMSTREAM can also do injection/vaporization tests in CVD/ALD processes conditions on a dedicated test bench equipped with a Vapbox and featuring flows, pressures and temperatures monitoring system
KEMSTREAM continuously expands its product offerings to meet customer needs. The complementary chemical and physical approach used by our multi-disciplinary experts’ team allows us to improve the products performances by implementing innovative solutions. The most promising ones are patented.
Management team and co-funders
Herve Guillon is President of KEMSTREAM and leads the company's sales. Dr. Guillon completed a Ph.D in Molecular Chemistry at University of Nice Sophia Antipolis under the supervision of Prof. Liliane Hubert-Pfalzgraf. Dr. Guillon is a specialist in metal-organic chemistry and precursor synthesis (for sol-gel, CVD and ALD processes). Dr. Guillon has also an extensive experience in designing DLI vaporization systems. He is one of the inventors of numerous patents in that field. After his Ph.D he joined Jipelec and then Qualiflow where he was R&D Manager and lead the development of several generations and types of DLI vaporizers.
Samuel Bonnafous is Chief Technology Officer of KEMSTREAM. He is graduate of Ecole Nationale des Arts et Metiers, and also graduate of Louisiana State University, where he received his master’s degree in mechanical engineering with a specialization in fluid dynamics. He worked formerly for Qualiflow, where he was R&D engineer and developed valves (including piezoelectric), gas Mass Flow Controllers and direct liquid injection vaporization systems.
Jean-Manuel Decams completed a Ph.D in Molecular Chemistry at University of Nice Sophia Antipolis under the supervision of Prof. Liliane Hubert-Pfalzgraf. Dr. Decams is a specialist in metal-organic chemistry and precursor synthesis (for sol-gel, CVD and ALD processes). Dr. Decams has also an extensive expertise in designing CVD and ALD systems. He has published extensively and is one of the inventors of numerous patents. After his Ph.D he joined Jipelec and then Qualiflow where he was R&D Engineer and lead the development of several innovative DLI-CVD processes and machines (DLI = Direct Liquid Injection).