Evaporation Equipment

EVAPORATION SOURCE (Point Source, Linear Source) and VACUUM SYSTEM (OLED System, Sputtering System)

Evaporation, sputtering, PE-CVD, ion beam deposition and other equipment for the needs of the semiconductor, opto-electronics and display, microscopy and microanalysis markets.

Clean Logistics System & Test Equipment: OHT, N2 Stocker, AGV, Inter-layer High-Speed Lifter, Clean Module Conveyor. FPD front end and module equipment.

PVD, CVD and MVD capital equipment, providing advanced wafer processing technologies and solutions for the semiconductor and microelectronics industry. End-market applications MEMS, advanced packaging, LED, high speed RF device IC’s and power semicon.

Thin film deposition and ion milling equipment

Vacuum pumps & components, Thin film forming equipment, Hard film forming equipment, Plasma processing equipment, Soldering equipment, Vacuum heat treatment equipment, Optical inspection equipment

Equipment for flat-panel displays, semiconductors and optical film sputtering equipment, and of vacuum equipment and laser equipment.

Direct Liquid Injection (DLI) vaporizers and atomizers for CVD, PECVD, iCVD, MOCVD, MOVPE, ALD, spray pyrolysis and all gas phase processes and precursors.

Precise surface processing equipment based on advanced ion beam and plasma technologies. The systems are applicable for coating, etching, and cleaning processes, especially for the MEMS, microelectronics, and precision optics industries.

Thin film deposition systems: pulsed laser deposition (PLD) systems, electron beam evaporators, thermal evaporators, reactive sputtering tool, hot filament chemical vapor deposition (HFCVD) systems, and thermal chemical vapor deposition (TCVD).

Modular Thin Film Deposition Systems and Components.

MBE (Molecular Beam Epitaxy) systems and components. Sources for thin film deposition. UHV deposition and annealing systems.

Vacuum thin film coating equipment

Vacuum equipment, peripheral devices, vacuum components and materials for the display, solar cell, semiconductor, electronics.

SEMPA SYSTEMS designs and manufactures stainless steel Gas and Chemical delivery systems

MOCVD epitaxial reactor manufacturer and technology provider.

Manufacturer of PVD and CVD systems and coated substrates.