SPTS Technologies, a KLA company, designs, manufactures, sells, and supports etch, PVD, CVD and MVD capital equipment, providing advanced wafer processing technologies and solutions for the semiconductor and microelectronics industry. End-market applications include micro-electromechanical systems (MEMS), advanced packaging, LED, high speed RF device IC’s and power semiconductors.
Formed in 2009, SPTS brings together over 40 years wafer processing experience from companies including Trikon Technologies, STS, and Aviza Technology. The solutions offered by SPTS include industry leading silicon etch, dielectric etch, dry-release etch, PVD, PECVD, and MVD. SPTS supplies wafer processing equipment and technologies to the world's leading semiconductor and microelectronic device manufacturers and research institutions, offering dedicated local sales and customer support through a network of international offices and agents. Under agreement with SPP Technologies, Ltd., SPTS also offers APCVD solutions and a range of large batch vertical furnaces.
SPTS Technologies has been recognized by leading industry experts, government agencies, and Her Majesty the Queen, having received the Queen’s Award for Enterprise in International Trade in 2013 and 2017 and for Innovation in 2018 and 2020. SPTS has also been given the prestigious Anchor Company status by the Welsh Government. Other accolades can be viewed on our Awards page.
Inductively Coupled Plasma (ICP) etch of silicon, dielectrics and polymers
Plasma Enhanced Chemical Vapor Deposition (PECVD)
Deep Reactive Ion Etching (DRIE)
Physical Vapor Deposition (PVD)
Dry Release Etch using HF vapor
Molecular Vapor Deposition (MVD®)
Isotropic etching of silicon using xenon difluoride (XeF2)