Product Lineup
Vacuum pumps & components
Dry vacuum pump, oil rotary vacuum pump, water-ring vacuum pump, etc.
Thin film forming equipment
Sputtering equipment, Vacuum Evaporation equipment, Plasma CVD equipment
Hard film forming equipment
DLC film forming equipment (PIG type), Ion plating system (ADIP)
Plasma processing equipment
Surface treatment equipment, Etching and Ashing equipment
Soldering equipment
Batch type Vacuum soldering equipment, continuous plasma reflow system, Atmosphere conveyor furnace
Vacuum heat treatment equipment
Vacuum sintering furnace, Vacuum annealing equipment, Vacuum baking equipment, Vacuum drying equipment
Optical inspection equipment
Bearing measuring projector, Polarimeter (Strain gauge)