ULVAC's base technology with vacuum technology at its core and related peripheral technologies have been combined through many years of R&D and improvements in manufacturing technology, enabling us now to deliver a very wide range of industrial manufacturing equipment for semiconductors, electronic parts, FPD, solar cells, and others.
ULVAC, as a general manufacturer of vacuum equipment, also focuses energy on the development of components in order to offer a wide-range component lineup. ULVAC delivers all types of products ranging from components such as vacuum valves, flanges, and terminals, to vacuum pumps and measurement and analysis equipment.
Sputtering System
CVD System
Vacuum Evaporation System
Vapor Deposition Polymerization System
Ashing System
Etching System
Ion Implantation System
Vacuum Furnace
Roll Coater
Freeze Drying / Vacuum Drying System
Vacuum Distillation System
Others
Rough&Middle Vacuum Pump
High Vacuum Pump
Vacuum Gauge
Gas Analyzer（Process Gas Monitor）
Leak Detector
High Speed Spectroscopic Ellipsometer
Deposition Controller
Vacuum Valve
DC Power Supply
DC PULSE Power Supply
MF Power Supply
RF Power Supply
EB Source・EB Power Supply
Vacuum Transfer Robot
QCM based Molecular Interaction Analyzers
Precise Microplate Paddle Mixer
Small Film Forming Equipment
Refrigerator (CRYO)
Heat Treatment And Thermal Properties
LVAC global production system delivers high quality, stable and low cost supply of puttering targets and various vapor depositon materials by making maximum use of its best features as an equipment manufacturer. ULVAC facilities also include the Institute for Super Materials which is a professional R&D facility for new materials. ULVAC also works closely with nearby production plants to support a broad range of needs ranging from trial production of samples for next-generation materials, to material supply, and technical consultations on mass production line operation.
Sputtering Targets
To develop and produce high quality sputtering targets, ULVAC carefully evaluates which manufacturing method to use for each material to meet the product quality goals “Low particle” “Good film uniformity” “High usage efficiency”.
Sputtering Targets for Flat Panel Display Applications
Sputtering Targets for Semiconductor Applications
IGZO Target
Evaporation Deposition Materials
igh Performance Materials
ULVAC performs welding processing (electron beam welding) such as Ta, Nb, Ti, Zr in the dry box highly managed the atmosphere or in the dry box under vacuum condition.
[Nb] High-purity Niobium Material for Superconducting Accelerators
Sheet [Ta] [Nb]
Wire/Bar [Ta] [Nb]
Tube/Pipe [Ta] [Nb]
Reactor Vessels [Ta] [Nb] [Zr]
Heat Exchanger [Ta] [Nb]
Columns [Ta] [Nb] [Zr]
Pipings [Ta] [Nb] [Zr] [Ti]
Coating [Ta] [Nb] [Zr] [Ti]
Nano-metal Ink
NANOMETAL INKs are produced by the Gas Evaporation Method. These newly developed inks consist of metal nanoparticles dispersed stably and not aggregated in some organic solvent. The inks enable to form electro-conductive fine patterns directly by printing processes such as ink-jet printing.
Electro-conductive Ink for Fine Patterning,"Ag"Series
Low Temperature Curing Silver Ink,"L-Ag"Series
Electro-conductive Ink for Fine Patterning,"Au"Series
