Blue Wave Semiconductors offers a variety of thin film deposition systems including, pulsed laser deposition (PLD) systems, electron beam evaporators, thermal evaporators, reactive sputtering tool, hot filament chemical vapor deposition (HFCVD) systems, and thermal chemical vapor deposition (TCVD) systems. These systems are excellent for synthesis of novel thin film materials and coatings, including nitrides, functional oxides/multilayers, diamond, graphene, CNTs, and 2D materials. Blue Wave Semi also provides deposition system accessories such as substrate heaters and in-situ monitoring tools. In addition, we provide prototype runs of thin films and coatings of metals, oxide coatings, transparent conductors, amorphous and nano-crystalline Si and SiC, crystalline AlN-GaN, and poly and nano diamond and HFCVD Diamond coatings and device fabrications.


Custom Deposition Systems
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Electron Beam (EBeam) PVD System
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Hot Filament Chemical Vapor Deposition (HFCVD) System
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Nanofurnace System
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Pulsed Laser Deposition (PLD) System
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Sputtering System
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Thermal Chemical Vapor Deposition System
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Thermal Evaporation System


Boron Nitride Substrate Heater for Vacuum Deposition
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Inconel Substrate Heater for Reactive Deposition
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Laser Reflectance Interferometer
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PLD Target Carousel
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Temperature Controller

 

 

 

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